Substrate process apparatus

ABSTRACT

A linear electrical machine comprising a frame with a level reference plane and an array of electromagnets, connected to the frame to form a drive plane at a predetermined height relative to the reference plane. The array of electromagnets being arranged so that a series of electromagnets of the array of electromagnets define at least one drive line within the drive plane, and each of the electromagnets being coupled to an alternating current power source energizing each electromagnet. At least one reaction platen of paramagnetic, diamagnetic, or non-magnetic conductive material disposed to cooperate with the electromagnets of the array of electromagnets so that excitation of the electromagnets with alternating current generates levitation and propulsion forces against the reaction platen that controllably levitate and propel the reaction platen along at least one drive line, in a controlled attitude relative to the drive plane.

CROSS REFERENCE TO RELATED APPLICATIONS

This application is a non-provisional and claims the benefit of U.S.Provisional Patent Application No. 62/979,195, filed Feb. 20, 2020, thedisclosure of which is incorporated herein by reference in its entirety.

BACKGROUND 1. Field

The exemplary embodiments generally relate to substrate processingequipment, and more particularly, to substrate transports of thesubstrate processing equipment.

2. Brief Description of Related Developments

Semiconductor automation generally comprises a series of building blocksthat are required to support the implementation of processes toultimately achieve predetermined levels of quality and reproducibilityin semiconductor chip manufacturing. One component of semiconductorautomation is the wafer (also referred to as a substrate) handler thattransports the wafer or substrate between load locks and process modulesand/or between process modules (e.g., in the case of sequential processtool architectures).

Generally, wafer handlers include robotic manipulators with rotary orprismatic joints and respective linkage-based mechanisms that are drivenby actuators away from an end-effector of the robotic manipulator, wherethe end effector contacts or otherwise interfaces with the wafer. Thedesign of such conventional manipulators generally includes theutilization of bearings in a vacuum environment at different portions ofthe manipulator structure, typically at the mechanical interfacesbetween each arm link of the manipulator. The utilization of bearings invacuum environments generally has a potential for lubricant outgassing,particle generation, and friction variability during the operation ofthe bearing in the vacuum environment while handling wafers at hightemperatures (such as in excess of 400° C.). The wafer handlers are alsogenerally mounted to a vacuum cluster tool and their mechanical strokeis limited by the design of their associated arm link lengths. As aresult, conventional wafer handlers, operating in a vacuum, are notsuitable for “long” vacuum cluster tools such as what are known in theindustry as “linear tool configurations”.

In the case of linear tool configurations, “long reach” manipulatorswith long arm link lengths and articulated end effectors are generallyemployed to transfer wafers between the load locks and process modulesof the linear tool. These long reach manipulators generally havemechanical designs with low natural frequencies, an increased numbers ofactuators, undesirable arm link deflection, mechanical positioninghysteresis, high sensitivity to thermal expansion, expensive bearings,limited ability to level the end effector to wafer holding stations, andlimited motion throughput. In addition, linear tool configuration may bescalable in the sense of allowing an end-user to extend a length of thelinear tool with minimum impact to the existing automation. Anotherdesirable feature of linear tools is the ability to service the lineartool (such as to perform scheduled maintenance on a wafer handler) withminimum disruption to tool operation.

As an alternative to the wafer handlers noted above, magnetic floatingwafer conveyors may be employed where an alternating current magneticfloating apparatus for floating and conveying a conductive floating bodyor paramagnetic or nonmagnetic metallic material above a line ofalternating current electromagnets is provided. The alternating currentmagnetic floating apparatus generally includes a single-phasealternating current source having a first frequency for floating thefloating body, a three-phase alternating current source having a secondfrequency for conveying the floating body, an adder for addingalternating current from the two current sources, and a supply circuitfor supplying the added alternating currents to the line of alternatingcurrent electromagnets. The floating body can be stopped at a desiredposition with efficient conveyance.

Also, FIGS. 33-36 show an example of an induction repulsive typemagnetic floating mechanism. In FIGS. 33-36, numeral 01 denotes analternating current electromagnet and numeral 02 denotes a floating bodyto be conveyed. Light and high-conductive material such as aluminum issuitable for the floating body 02. An object to be conveyed is usuallyplaced on the floating body 02. In FIGS. 33-36, when a single phasealternating current indicated by numeral 04 of FIG. 35 is supplied tothe alternating current electromagnets 01, an alternating magnetic fieldis generated above the electromagnets. Since the floating body ispresent in the magnetic field, an alternating current called an Eddycurrent is generated in the aluminum material forming the floating body.

A magnetic field generated by the Eddy current repels the magnetic fieldgenerated by the electromagnets. Accordingly, a floating force denotedby F1 in FIGS. 33 and 34 acts on the floating body by this repulsion.When three phase alternating currents indicated by numerals 05, 06, and07 shown in FIG. 36 are supplied to the three-phase electromagnets 03 ofFIGS. 33 and 34, a moving force denoted by F2 in FIGS. 33 and 34 acts onthe floating body 02 and the floating body 02 is conveyed.

BRIEF DESCRIPTION OF THE DRAWINGS

The foregoing aspects and other features of the disclosed embodiment areexplained in the following description, taken in connection with theaccompanying drawings, wherein:

FIG. 1A is a schematic plan view of a substrate processing apparatusincorporating aspects of the disclosed embodiment;

FIG. 1B is a schematic plan view of a substrate processing apparatusincorporating aspects of the disclosed embodiment;

FIG. 2 is a schematic plan view of a substrate processing apparatusincorporating aspects of the disclosed embodiment;

FIG. 3 is a schematic plan view of a substrate processing apparatusincorporating aspects of the disclosed embodiment;

FIG. 4 is a schematic plan view of a substrate processing apparatusincorporating aspects of the disclosed embodiment;

FIG. 5 is a schematic plan view of a substrate processing systemincorporating aspects of the disclosed embodiment;

FIG. 6 is an exemplary substrate handler motion of the substrateprocessing apparatus described herein in accordance with aspects of thedisclosed embodiment;

FIG. 7 is a schematic plan view of a substrate processing systemincorporating aspects of the disclosed embodiment;

FIG. 8 is a schematic plan view of a substrate processing apparatusincorporating aspects of the disclosed embodiment;

FIG. 8A is a schematic perspective view of a portion of a substratehandler in accordance with aspects of the disclosed embodiment;

FIG. 9 is a schematic plan view of a substrate processing apparatusincorporating aspects of the disclosed embodiment;

FIG. 10 is a schematic plan view of a substrate processing apparatusincorporating aspects of the disclosed embodiment;

FIG. 10A is a schematic perspective view of a portion of a substratehandler of FIG. 10 in accordance with aspects of the disclosedembodiment;

FIG. 11 is a schematic plan view of a substrate processing apparatusincorporating aspects of the disclosed embodiment;

FIG. 11A is a schematic perspective view of a portion of a substratehandler of FIG. 11 in accordance with aspects of the disclosedembodiment;

FIG. 12A is a schematic plan view of a substrate processing apparatusincorporating aspects of the disclosed embodiment;

FIG. 12B is a schematic elevation view of the substrate processingapparatus of FIG. 12A in accordance with aspects of the disclosedembodiment;

FIG. 13A is a schematic plan view of a substrate processing apparatusincorporating aspects of the disclosed embodiment;

FIG. 13B is a schematic elevation view of the substrate processingapparatus of FIG. 13A in accordance with aspects of the disclosedembodiment;

FIG. 14 is a schematic plan view of a substrate processing apparatusincorporating aspects of the disclosed embodiment;

FIG. 14A is a schematic plan view of a portion of the substrateprocessing apparatus of FIG. 14 in accordance with aspects of thedisclosed embodiment;

FIG. 14B is a schematic elevation view of a substrate transport cart inaccordance with aspects of the disclosed embodiment;

FIG. 14C is a schematic plan view of the substrate transport car in FIG.14B in accordance with aspects of the disclosed embodiment;

FIG. 15A is a front elevation view of a substrate handler in accordancewith aspects of the disclosed embodiment;

FIG. 15B is a schematic side elevation view of the substrate handler ofFIG. 15A in accordance with aspects of the disclosed embodiment;

FIG. 15C is a schematic plan view of the substrate handler of FIG. 15Ain accordance with aspects of the disclosed embodiment;

FIG. 16A is a schematic plan view of the substrate handler in accordancewith aspects of the disclosed embodiment;

FIG. 16B is a schematic side elevation view of the substrate handler ofFIG. 16A in accordance with aspects of the disclosed embodiment;

FIG. 16C is a schematic plan view of a portion of a substrate processingapparatus including the substrate handler of FIG. 16A in accordance withaspects of the disclosed embodiment;

FIG. 17 is a schematic illustration of an exemplary actuator controlsystem network in accordance with aspects of the disclosed embodiment;

FIG. 18 is a schematic illustration of a portion of a sensor controlsystem network in accordance with aspects of the disclosed embodiment;

FIG. 19 is a schematic illustration of an exemplary sensor controlsystem network in accordance with aspects of the disclosed embodiment;

FIG. 20 is a schematic illustration of a portion of the sensor controlsystem network of FIG. 19 in accordance with aspects of the disclosedembodiment;

FIG. 21 is a schematic illustration of an exemplary motion control of asubstrate handler in accordance with aspects of the disclosedembodiment;

FIG. 21A is a schematic perspective illustration of a substrate handlermotion in accordance with aspects of the disclosed embodiment;

FIG. 22 is a free body force diagram with respect to a maximum allowedacceleration with conventional substrate transport apparatus;

FIG. 23 is a free body force diagram illustrating an effect of pitchangle on acceleration of a substrate handler with respect to substrateslippage in accordance with aspects of the disclosed embodiment;

FIG. 24 is a free body force diagram of a substrate illustrating theeffects of pitch angle, without friction, on substrate slippage inaccordance with aspects of the disclosed embodiment;

FIG. 24A is an exemplary graph illustrating propulsion acceleration inrelation to pitch angle, without friction, with respect to substrateslippage in accordance with aspects of the disclosed embodiment;

FIG. 25A is a free body force diagram of a substrate illustrating theeffects of pitch angle, with friction, on substrate slippage inaccordance with aspects of the disclosed embodiment;

FIG. 25B is a free body force diagram of a substrate illustrating theeffects of pitch angle, with friction, on substrate slippage inaccordance with aspects of the disclosed embodiment;

FIG. 26 is an exemplary graph illustrating acceleration limits inrelation to pitch angle, with friction, with respect to substrateslippage in accordance with aspects of the disclosed embodiment;

FIG. 27 is a schematic elevation view of a substrate handlerillustrating pitch control of the substrate handler in accordance withaspects of the disclosed embodiment;

FIG. 28 is a schematic elevation view of one substrate handler passingby another substrate handler within a transport chamber in accordancewith aspects of the disclosed embodiment;

FIG. 29 is a schematic elevation view of one substrate handler passingby another substrate handler within a transport chamber in accordancewith aspects of the disclosed embodiment;

FIG. 30 is a schematic illustration of a portion of the actuator controlsystem network showing dynamic phase allocation in accordance withaspects of the disclosed embodiment;

FIGS. 31A and 31B illustrate tilt control of a platen utilizing aconventional linear drive system and static phase control.

FIGS. 32A and 32B illustrate tilt control of a portion of a substratehandler utilizing the actuator control system network with dynamic phaseallocation and virtual multiphase actuator units in accordance withaspects of the disclosed embodiment;

FIG. 32C illustrates electrical phase angle control with the actuatorcontrol system network to effect independent propulsion and lift controlof a substrate handler in accordance with aspects of the disclosedembodiment;

FIG. 33 is a schematic front view of a conventional transport apparatus;

FIG. 34 is a schematic plan view of the conventional transport apparatusof FIG. 33;

FIG. 35 is a diagram showing a waveform of a floating current in theconventional transport apparatus of FIG. 33;

FIG. 36 is a diagram showing waveforms of three alternating currents forconveyance in the conventional transport apparatus of FIG. 33;

FIG. 37 is a schematic plan view of a conventional substrate processingapparatus;

FIG. 38 is a schematic plan view of a conventional substrate processingapparatus;

FIG. 39 is a schematic illustration of a clustered control architecturein accordance with aspects of the disclose embodiment;

FIG. 40A is a schematic illustration of a PVT frame in accordance withaspects of the disclosed embodiment;

FIG. 40B is a schematic illustration of a PVT-FG frame in accordancewith aspects of the disclosed embodiment;

FIG. 41 is a flow chart of an exemplary method in accordance withaspects of the disclosed embodiment; and

FIG. 42 is a flow chart of an exemplary method in accordance withaspects of the disclosed embodiment.

DETAILED DESCRIPTION

FIGS. 1-14 illustrate exemplary substrate processing apparatus 100,100A, 200, 300, 400, 500, 800, 900, 1200, 1300 in accordance withaspects of the disclosed embodiment. Although the aspects of thedisclosed embodiment will be described with reference to the drawings,it should be understood that the aspects of the disclosed embodiment canbe embodied in many forms. In addition, any suitable size, shape or typeof elements or materials could be used.

Based on the problems and limitations of conventional substrateprocessing apparatus noted above, it is desirable to have a new andinnovative substrate handler and associated controls framework that areconfigured to operate in vacuum environment substantially withoutbearing and lubricants, perform substrate transfers across scalabledistances without impacting the substrate handler design, transportsubstrates at higher accelerations than the conventional solutions notedabove (i.e., substantially without requiring new end-effectormaterials), and operate multiple substrate handlers in a coordinatedmanner to avoid collisions and reduce a footprint of the substrateprocessing apparatus.

Referring to FIGS. 15A-15C, a wafer handler 1500 is part of linearelectrical (or electric) machine 1599 (as will be described in greaterdetail herein and also referred to as an electromagnetic conveyorsubstrate transport apparatus) included in the substrate processingapparatus of FIGS. 1-14. The wafer handler 1500 includes a paramagneticbase 1510 (also referred to as a reaction platen) (e.g., made of copper,aluminum or other suitable diamagnetic or nonmagnetic material that caninduce Eddy currents) that is shaped to effect at least bi-directionallinear induction propulsion along a direction of linear tracks 1550formed by at least one linear induction motor stator 1560, andindependent rotation of the base 1510. The wafer handler 1500 alsoincludes an end-effector 1520 that is rigidly attached to the base 1510and configured to stably hold substrates for transport throughout arespective chamber of a substrate processing apparatus. The waferhandler 1500 is controlled by actuator and sensor control units, as willbe described herein so that the configuration of the wafer handler 1500is not dependent on the stroke distances the wafer handler 1500 cancover (or extend). The independence of the wafer handler configuration1500 is effected by utilizing a network of actuators 1700 and sensors2000 (shown in and described in greater detail with respect to FIGS.17-20 and 39) that are physically distributed along at least a length ofthe substrate processing apparatus (such as along a length of atransport chamber 118) as will be described herein. In the aspects ofthe disclosed embodiment, the actuators 1700 and sensors 2000 are nottied to any specific substrate handler 1500; rather, the same actuators1700 and sensors 2000 (are common to and) can control multiple substratehandlers 1500 concurrently, which reduces cost of ownership of thesubstrate handlers 1500 as the substrate handlers 1500 may be added toor removed from a substrate processing apparatus without addingadditional actuators and sensors. Concurrent control of multiplesubstrate handlers 1500 with common actuators 1700 and sensors 2000 iseffected by a control system in accordance with the aspects of thedisclosed embodiment (described in greater detail below) that isconfigured to dynamically allocate the excitation phase of each actuatorcoil unit (also referred to as an electromagnet) of the common actuators1700 between different excitation phases in a manner that providescontinuity of force vectors for performing wafer handler motion in athree-dimensional space with control of up to six degrees of freedomfrom the common (set) of actuators 1700. As will be described herein,the concurrently controlled substrate handlers 1500 may be controlled inroll, pitch, and/or yaw to allow two or more independently operatedsubstrate handlers 1500 to decrease a distance between the substratehandlers 1500 by tilting each (or at least one) of the substratehandlers 1500 along a rotation axis substantially parallel to the motionthrust direction (see, e.g., FIG. 29).

As noted above, conventional robotic manipulators with articulated linksrequire substantially different mechanical designs as the requiredstroke of the manipulators is increased in order to reach a largernumber of process modules, which increases the cost of the roboticmanipulators and may shorten robotic manipulator service intervals.Contrary to conventional substrate handling systems, the aspects of thedisclosed embodiment are highly scalable when compared to existingcommonly accepted substrate handling solutions (such as those describedabove) without adding complexity and reliability concerns resultant froman increased number of mechanical components.

The aspects of the disclosed embodiment also effect substantially highersubstrate processing throughput compared to the conventional substratehandling solution. As described herein, the aspects of the disclosedembodiment include an innovative motion sensing controls framework thatpitches a substrate holding surface of the substrate handler endeffector towards a direction of movement to provide for higheraccelerations compared to the conventional substrate handling solutionswhile maintaining contact between the wafer and the end effector withoutslippage.

As will be described in greater detail herein, the aspects of thedisclosed embodiment provide for a magnetic levitated substratetransport apparatus based on linear induction technology that isconfigured to provide lift, lateral stabilization, and propulsion to thesubstrate handler. Aspects of the disclosed embodiment also provide fora linear induction motor stator operating in and forming independentlycontrolled linear tracks that are orthogonal or otherwise angled at anorientation between being substantially parallel and substantiallyorthogonal and/or forming arcuate or rotary paths over a two-dimensionalarea. The aspects of the disclosed embodiment provide a coil controllerthat is configured to generate alternating current at a prescribedfrequency and amplitude for each phase of each linear induction motorstator associated with a respective linear track 1550. The propulsionforces provided by the linear tracks are controlled so as to rotate thebase 1510, independent of linear movement of the base along the tracks,where the propulsion forces generate a moment load around an axis ofrotation of the base 1510.

The aspects of the disclosed embodiment include a control systemconfigured to track a position of the base 1510 and control the phasecurrents of the independent linear tracks 1550 for controlling motion ofthe base 1510 along a desired propulsion direction along the independentlinear tracks 1550. The control system, in accordance with aspects ofthe disclosed embodiment, also provides for motion of the base 1510 in alift direction while maintaining lateral stabilization of the base 1510.The control system is configured to generate propulsion forces with thelinear tracks 1550 so as to control roll, pitch, and yaw of thesubstrate handler 1500, where the roll, pitch, and yaw motions of thesubstrate handler 1500 may be employed to maximize substrate productionthroughput by adjusting an inclination of the substrate handler 1500(see, e.g., FIG. 21) depending on a desired acceleration of thesubstrate handler 1500 in linear and/or rotation directions of motion,so as to increase the acceleration threshold along a thrust direction ofthe substrate handler 1500.

The aspects of the disclosed embodiment include a sensor processing unit1850 (see FIG. 18) that may be part of a sensor and controls networksuch as EtherCat® (Ethernet for Control Automation Technology, referredto as ECat in FIG. 18), EtherNet® (referred to as ENet in FIG. 18) orother suitable sensor and controls network. The sensor processing unitincludes a general-purpose sensor and processing hardware (includingnon-transient computer program code or software) configured to interfacewith multiple sensor technologies such as cameras 1810, CCD arrays 1811,accelerometers 1812, temperature sensors 1813, proximity or distancesensors 1814, magnetic sensors 1815, vibration sensors 1816, or anyother suitable sensors.

Referring to FIG. 1A, there is shown a schematic plan view of asubstrate processing apparatus 100 incorporating aspects of thedisclosed embodiment. The substrate processing apparatus 100 isconnected to an environmental front end module (EFEM) 114 which has anumber of load ports 112 as shown in FIG. 1A. The load ports 112 arecapable of supporting a number of substrate storage canisters 171 suchas for example conventional FOUP canisters; though any other suitabletype may be provided. The EFEM 114 communicates with the processingapparatus through load locks 116 which are connected to the processingapparatus as will be described further below. The EFEM 114 (which may beopen to atmosphere) has a substrate transport apparatus (not shown—butin some aspects is similar to the linear electrical machine 1599described herein) capable of transporting substrates from load ports 112to load locks 116. The EFEM 114 may further include substrate alignmentcapability, batch handling capability, substrate and carrieridentification capability or otherwise. In other aspects, the load locks116 may interface directly with the load ports 112 as in the case wherethe load locks have batch handling capability or in the case where theload locks have the ability to transfer wafers directly from the FOUP tothe lock. Some examples of such apparatus are disclosed in U.S. Pat.Nos. 6,071,059, 6,375,403, 6,461,094, 5,588,789, 5,613,821, 5,607,276,5,644,925, 5,954,472, 6,120,229, and 6,869,263 all of which areincorporated by reference herein in their entirety. In other aspects,other load lock options may be provided.

Still referring to FIG. 1A, the processing apparatus 100, may be usedfor processing semiconductor substrates (e.g. 200 mm, 300 mm, 450 mm, orother suitably sized wafers), panels for flat panel displays, or anyother desired kind of substrate, generally comprises transport chamber118 (which in one aspects holds a sealed atmosphere therein), processingmodules 120, and at least one substrate transport apparatus or linearelectrical machine 1599. The substrate transport apparatus 1599 in theaspect shown may be integrated with the chamber 118 or coupled to thechamber in any suitable manner as will be described herein. In thisaspect, processing modules 120 are mounted on both sides of the chamber118. In other aspects, processing modules 120 may be mounted on one sideof the chamber 118 as shown for example in FIG. 2. In the aspect shownin FIG. 1A, processing modules 120 are mounted opposite each other inrows Y1, Y2 or vertical planes. In other aspects, the processing modules120 may be staggered from each other on the opposite sides of thetransport chamber 118 or stacked in a vertical direction relative toeach other. Referring also to FIGS. 15A-15C, the transport apparatus1599 has substrate handler 1500 that is moved in the chamber 118 totransport substrates between load locks 116 and the processing chambers120. In the aspect shown, only one substrate handler 1500 is provided;however, in other aspects more than one substrate handler may beprovided. As seen in FIG. 1A, the transport chamber 118 (which issubjected to vacuum or an inert atmosphere or simply a clean environmentor a combination thereof in its interior) has a configuration, andemploys the novel substrate transport apparatus 1599 that allows theprocessing modules 120 to be mounted to the chamber 118 in a Cartesianarrangement with processing modules 120 arrayed in substantiallyparallel vertical planes or rows. This results in the processingapparatus 100 having a more compact footprint than a comparableconventional processing apparatus, such as those described herein.Moreover, the transport chamber 118 may be capable of being providedwith any desired length (i.e., the length is scalable) to add anydesired number of processing modules 120, as will be described ingreater detail below, in order to increase throughput. The transportchamber 118 may also be capable of supporting any desired number oftransport apparatus 1599 therein and allowing the transport apparatus1599 to reach any desired processing chamber 120 coupled to thetransport chamber 118 without interfering with each other. This ineffect decouples the throughput of the processing apparatus 100 from thehandling capacity of the transport apparatus 1599, and hence theprocessing apparatus 100 throughput becomes processing limited ratherthan handling limited. Accordingly, throughput can be increased asdesired by adding processing modules 120 and corresponding handlingcapacity on the same platform.

Still referring to FIG. 1A, the transport chamber 118 in this aspect hasa general rectangular shape though in other aspects the chamber may haveany other suitable shape. The chamber 118 has a slender shape (i.e.length much longer than width) and defines a generally linear transportpath for the transport apparatus 1599 therein. The chamber 118 haslongitudinal side walls 118S. The side walls 118S have transportopenings or ports 118O (also referred to as substrate pass throughopenings) formed therethrough. The transport ports 118O are sized largeenough to allow substrates to pass through the ports (can be sealablethrough valves) into and out of the transport chamber 118. As can beseen in FIG. 1A, the processing modules 120 in this aspect are mountedoutside the side walls 118S with each processing module 120 beingaligned with a corresponding transport port 118O in the transportchamber 118. As can be realized, each processing module 120 may besealed against the sides 118S of the chamber 118 around the periphery ofthe corresponding transport aperture to maintain the vacuum in thetransport chamber. Each processing module 120 may have a valve,controlled by any suitable means to close the transport port whendesired. The transport ports 118O may be located in the same horizontalplane. Accordingly, the processing modules on the chamber are alsoaligned in the same horizontal plane. In other aspects, the transportports 118O may be disposed in different horizontal planes. As seen inFIG. 1A, in this aspect, the load locks 116 are mounted to the chambersides 118S at the two front most transport ports 118O. This allows theload locks 116 to be adjacent the EFEM 14 at the front of the processingapparatus. In other aspects, the load locks 116 may be located at anyother transport ports 118O on the transport chamber 118 such as shownfor example in FIG. 2. The hexahedron shape of the transport chamber 118allows the length of the chamber to be selected as desired in order tomount as many rows of processing modules 120 as desired (for example seeFIGS. 1B, 3, 4-7 showing other aspects in which the transport chamber118 length is such to accommodate any number of processing modules 120).

As noted before, the transport chamber 118 in the aspect shown in FIG.1A has a substrate transport apparatus 1599 having a single substratehandler 1500. The transport apparatus 1599 is integrated with thechamber 118 to translate substrate handler 1500 back and forth in thechamber 118 between front 118F and back 118R. The substrate handler 1500of the substrate transport apparatus 1599 has at least one end effector1520 for holding one or more substrates.

It should be understood that the transport apparatus 1599, shown in FIG.1A is a representative transport apparatus and, includes the substratehandler 1500 which is magnetically supported from the linear tracks1550. The transport apparatus 1599 will be described in greater detailbelow. The transport chamber 118 may form a frame with a level referenceplane 1299 (e.g., that defines or otherwise corresponds (e.g., issubstantially parallel) with a wafer transport plane 1290—see FIG. 12B)linear tracks 1550 may be mounted to the side walls 118S or floor of thetransport chamber 118 and may extend the length of the chamber 118. Thisallows the substrate handler 1500 to traverse the length of the chamber118. As will be described in greater detail below the linear tracks 1550of FIG. 1A each include an array of electromagnets or actuators 1700,also referred to herein as a network of actuators as in FIGS. 14A, 15B,15B, 16B, 16C, and 17 (e.g., that form at least one linear inductionmotor stator 1560), connected to the transport chamber 118 to form adrive plane 1598 at a predetermined height H relative to the referenceplane 1299, the array of electromagnets 1700 being arranged so that aseries of the electromagnets 1700 define at least one drive line withinthe drive plane 1598, and each of the electromagnets 1700A-1700 n (seeFIG. 15B) being coupled to an alternating current (AC) power source 1585energizing each electromagnet 1700A-1700 n, where the alternating powersource is, in one aspect, a three phase alternating current powersource. As noted above (see FIG. 15A), the base or reaction platen 1510is formed of a paramagnetic, diamagnetic, or non-magnetic conductivematerial disposed to cooperate with the electromagnets 1700A-1700 n ofthe array of electromagnets 1700 so that excitation of theelectromagnets 1700A-1700 n with alternating current from thealternating current source 1585 generates levitation forces FZ andpropulsion forces FP (see FIG. 21) against the base 1510 thatcontrollably levitate and propel the base 1510 along the at least onedrive line 177-180 (see, e.g., FIGS. 1-8), in a controlled attituderelative to the drive plane 1598.

FIG. 1B shows another aspect of a substrate processing apparatus 100Awhich is generally similar to apparatus 100. In this aspect, thetransport chamber 118 has two substrate handlers 1500A, 1500Bindependently operated by the array of electromagnets 1700 (as in FIG.16C). The substrate handlers 1500A, 1500B are substantially the same asthe substrate handler 1500 in the previously described aspect. Both ofthe substrate handlers 1500A, 1500B may be supported from a common arrayof electromagnets 1700 as described before. The base 1510 of eachsubstrate handler 1500A, 1500B may be driven by the same at least onelinear induction motor stator 1560 as will be described herein, byindividually controlling each coil element or electromagnet 1700A-1700 n(as in FIG. 15B). Thus, as can be realized the end effector 1520 eachsubstrate handler 1500 can be independently moved in linear movementand/or rotation using the at least one linear induction motor stator1560. However, in this aspect the substrate handlers 1500A, 1500B arenot capable of passing each other in the transport chamber 118 as thetransport chamber 118 includes but one drive line 177 (compared totransport chambers having multiple substantially parallel drive lines asshown in FIGS. 8-10). Accordingly, the processing modules 120 arepositioned along the length of the transport chamber 118 so that thesubstrate may be transported to be processed in the processing module ina sequence which would avoid the substrate handlers 1500A, 1500B frominterfering with each other. For example, processing modules for coatingmay be located before heating modules, and cooling modules and etchingmodules may be located last.

However, referring to FIGS. 8-10, the transport chamber 118 may have anysuitable width to provide for two or more drive substantially paralleldrive lines 177, 178 that extend at least along a portion of alongitudinal length of the transport chamber 118 so that the twosubstrate handlers 1500A, 1500B pass adjacent each other (akin to a siderail or bypass rail). In the aspects illustrated in FIGS. 8-10 thetransport apparatus 1599 has two drive lines 177, 178 but in otheraspects any suitable number of substantially parallel longitudinallyextending drive lines may be provided.

In accordance with some aspects of the disclosed embodiment, the arrayof electromagnets 1700 (or at least a portion thereof) may also be usedas heater for the wafer handler (e.g., so as to control heating of thereaction platen and/or wafer to a desired predetermined temperature andfor a desired predetermined time) as in the case where it is desired toeliminate water vapor (e.g., gas) or potentially pre-heat thewafer/substrate picked from, e.g., a load port en route to a processmodule or alternatively reduce thermal gradient between the wafer at theprocess module and the wafer handler end effector. The heating of thewafer handler may be effected with the reaction platen in transit orwith the reaction platen held static in a predeterminedlocation/position. Still In accordance with some aspects of thedisclosed embodiment, the array of electromagnets 1700 (or at least aportion thereof) may also be used as heaters as in the case where it isdesired that the transport chamber 118 be heated for degas as in thecase to eliminate water vapor for example. Controlled heating of thetransport chamber 118 to a predetermined temperature for a predeterminedtime may be with the reaction platen static. The controlled heating ofthe transport chamber 118 may facilitate thermal scanning with suitablethermal sensors/infrared sensors of the transport chamber 118, such asto identify presence and map a location of the reaction platen withinthe transport chamber 118 at cold start or power off of the transportchamber 118 and drives.

Referring now to FIGS. 4 and 5 there are shown other substrateprocessing apparatus 400, 500 in accordance with other aspects of thedisclosed embodiment. As seen in FIGS. 4 and 5 the transport chamber(s)118, 118A, 118B, 118C in these aspects is elongated to accommodateadditional processing modules 120. The apparatus shown in FIG. 4 hastwelve (12) processing modules 120 connected to the transport chamber118. The processing apparatus 500 in FIG. 5 is illustrated as having twotransport chambers 118A, 118B coupled to each other by a bridgingchamber 118C that provides for movement of the substrate handlers 1500between the transport chambers 118A, 118B. Here, each transport chamber118A, 118B in FIG. 5 has 24 processing modules 120 connected thereto.The numbers of processing modules 120 shown in these aspects are merelyexemplary, and the substrate processing apparatus may have any othernumber of processing modules 120 as previously described. The processingmodules 120 in these aspects are disposed along the sides of therespective transport chamber 118A, 118B in a Cartesian arrangementsimilar to that previously discussed. The number of rows of processingmodules 120 in these aspects, however have been greatly increased (e.g.six (6) rows in the apparatus of FIG. 4, and twelve (12) rows in each ofthe apparatus of FIG. 5). In the aspect shown in FIG. 4, the EFEM may beremoved and the load ports 112 may be mated directly to the load locks116. The transport chambers of the substrate processing apparatus 400,500 in FIGS. 4, and 5 may have multiple substrate handlers 1500 tohandle the substrates between the load locks 116 and the processingchambers 120. The number of substrate handlers 1500 shown is merelyexemplary and more or fewer apparatus may be used. The substratetransport apparatus 1599 (a portion of which is illustrated in FIGS. 4and 5) in these aspects are generally similar to that previouslydescribed, comprising the linear tracks 1550 and substrate handler(s)1500. In the aspects shown in FIGS. 4 and 5, while only a singlelongitudinal drive line (e.g., drive lines 177, 178, 179 is illustratedin each chamber 118, 118A, 118B, 118C, it should be understood that inother aspects multiple drive lines may longitudinally extend along eachchamber 118, 118A, 118B, 118C in a manner substantially similar to thatillustrated in FIGS. 8-10. As can be realized, as with the othersubstrate transport apparatus 100, 100A, 200, 300, 800, 900, 1200, 1300described herein, the substrate transport apparatus 400, 500 has acontroller 199 for controlling the movements of the one or moresubstrate handlers 1500 of the substrate transport apparatus 1599.

Still referring to FIG. 5, the transport chambers 118A, 118B in thiscase may be mated directly to a tool 300 (e.g., a stocker,photolithography cell, or other suitable processing tool) where thesubstrates are delivered to and removed from the tool 300 throughchamber 118C.

As may be realized from FIGS. 1B, 3 and 4-5 the transport chamber 118may be extended as desired to run throughout the processing facility P(FIG. 5, and example of which is illustrated in FIG. 7). As seen in FIG.5, and as will be described in further detail below, the transportchamber (generally referred to as transport chamber 118) may connect andcommunicate with various sections or bays 118P1-118P4 in the processingfacility P such as for example storage, lithography tool, metaldeposition tool or any other suitable tool bays. Bays interconnected bythe transport chamber 118 may also be configured as process bays orprocesses 118P1, 118P3. Each bay has desired tools (e.g. lithography,metal deposition, heat soaking, cleaning) to accomplish a givenfabrication process in the semiconductor workpiece. In either case, thetransport chamber 118 has processing modules 120, corresponding to thevarious tools in the facility bays, communicably connected thereto, aspreviously described, to allow transfer of the semiconductor workpiecebetween chamber 118 and processing modules 120. Hence, the transportchamber 118 may contain different environmental conditions such asatmospheric, vacuum, ultra-high vacuum (e.g., 10-5 Torr), inert gas, orany other, throughout its length corresponding to the environments ofthe various processing modules connected to the transport chamber.Accordingly, the section 118P1 of the chamber in a given process or bayor within a portion of the bay, may have for example, one environmentalcondition (e.g. atmospheric), and another section 118P2, 118P3 of thechamber 118 may have a different environmental condition. As notedbefore, the section 118P1-118P4 of the chamber 118 with differentenvironments therein may be in different bays of the facility, or mayall be in one bay of the facility. FIG. 5 shows the chamber 118 havingfour sections 118P-118P4 with different environments for examplepurposes only. The chamber 118 in this aspect may have as many sectionswith as many different environments as desired.

As seen in FIG. 5, the substrate handlers 1500 in the transport chamber118 are capable of transiting between sections 118P1-118P4 of thechamber 118 with different environments therein. Hence, as can berealized from FIG. 5, each of the substrate handlers 1500 may with onepick move a semiconductor workpiece from the tool in one process or bayof the processing facility to another tool with a different environmentin a different process or bay of the process facility. For example,substrate handler 1500A may pick a substrate in processing module 301,which may be an atmospheric module, lithography, etching or any otherdesired processing module in section 118P1, of transport chamber 118.The substrate handler 1500A may then move along drive line 177 (or adrive line substantially parallel thereto where more than onelongitudinal drive line are provided) from section 118P1 of the chamber118 to section 118P3 (e.g., where the other substrate handlers 1500 arecontroller to avoid interference with substrate handler 1500A in anysuitable manner). In section 118P3, the substrate handler 1500A mayplace the substrate in processing module 302, which may be any desiredprocessing module.

As can be realized from FIG. 5, the transport chamber 118 may bemodular, with chamber modules connected as desired to form the chamber118 (e.g., formed by the three chamber sections 118A, 118B, 118C, whereeach chamber section 118A, 118B, 118C may also include one or morechamber modules that are coupled to each other in any suitable manner).Referring also to FIG. 1A, the modules may include internal walls 118I,similar to walls 118F, 118R in FIG. 1A, to segregate sections118P1-118P4 of the chamber 118. Internal walls 181 may include slotvalves, or any other suitable valve allowing one section of the chamber118P1-118P4 to communicate with one or more adjoining sections. The slotvalves 118V, may be sized to allow, one or more substrate handlers 1500to transit through the valves 18V from one section 118P1-118P4 toanother. In this way, the substrate handlers 1500 may move anywherethroughout the chamber 118. The valves 118V may be closed to isolatesections 118P1-1184 of the chamber 118 so that the different sectionsmay contain disparate environments as described before. Further, theinternal walls 118I of the chamber modules may be located to form loadlocks (see section 118P4) as shown in FIG. 5. The load locks 118P4 (onlyone is shown in FIG. 5 for example purposes) may be located in chamber118 as desired and may hold any desired number of substrate handlers1500 therein.

In the aspect shown in FIG. 5, processes within chamber sections 118Aand 118B may be the same processes, for example etch, where theprocessing apparatus 500 including tool 300 (such as a stocker) arecapable of processing substrates without any associated materialhandling overhead associated with transporting FOUPS from the stocker toindividual process modules 120 via an automated material handlingsystem, and transporting individual wafers via EFEM's to the respectiveprocessing modules 120. Instead, a robot within the stocker directlytransfers FOUPS 171 to the load ports (three load ports are shown perchamber section, more or less could be provided depending on throughputrequirements) where the wafers are batch moved into locks and dispatchedto their respective process module(s) depending on the desired processand/or throughput required. The chamber sections 118A, 118B or thestocker 300 may further have metrology capability, sorting capability,material identification capability, test capability, inspectioncapability, etc. as required to effectively process and test substrates.

In the aspect of the disclosed embodiment shown in FIG. 5, more or lesschamber sections 118A and 118B may be provided that have differentprocesses, for example etch, CMP, copper deposition, PVD, CVD, etc.where the chamber sections 118A, 118B, etc. in combination with the tool300 being, for example a photolithography cell are capable of processingsubstrates without the associated material handling overhead associatedwith transporting FOUPs from stockers to individual process tool baysand a lithography bay via an automated material handling system, andtransporting individual wafers via EFEM's to the respective processingtools. Instead, the automation within the lithography cell directlytransfers FOUPS, substrates or material to the load ports 112 (againthree load ports are shown per chamber section/process type, noting moreor less could be provided depending on throughput requirements) wherethe substrates are dispatched to their respective process depending onthe desired process and/or throughput required. An example of such analternative is shown in FIG. 7. In this manner, the apparatus in FIG. 5processes substrates with less cost, lower footprint, less WIP required(compared to the conventional processing systems describedherein)—therefor with less inventory and with a quicker turnaround whenlooking at the time to process a single carrier lot (or “hot lot”), andwith a higher degree of contamination control resulting in significantadvantages for the fabrication facility operator. The chamber sections118A, 118B (each of which may be referred to as a tool or tool section)or the tool or cell 300 may further have metrology capability,processing capability, sorting capability, material identificationcapability, test capability, inspection capability, etc. as required toeffectively process and test substrates. As can be realized from FIG. 5,the chamber sections 118A, 118B, and tool 300 may be coupled to share acommon controller environment (e.g. inert atmosphere, or vacuum). Thisensures that substrates remain in a controlled environment from tool 300and throughout the substrate processing apparatus 500. This eliminatesuse of special environment controls of the FOUPs as in conventionalsubstrate processing apparatus such as those shown in FIGS. 37 and 38.

Referring now to FIG. 7, there is shown an exemplary fabricationfacility layout 601 incorporating aspects of the disclosed embodimentthat are shown in FIG. 5. Wafer handlers 406, similar to wafer handlers1500 transport substrates or wafers through process steps within thefabrication facility 601 through transport chambers 602, 604, 606, 608,610, 612, 614, 616, 618, 620, 624, 626. Process steps may includeepitaxial silicon 630, dielectric deposition 632, photolithography 634,etching 636, ion implantation 638, rapid thermal processing 640,metrology 642, dielectric deposition 644, etching 646, metal deposition648, electroplating 650, chemical mechanical polishing 652. In otheraspects, more or less processes may be involved or mixed; such as etch,metal deposition, heating and cooling operations in the same sequence.As noted before, wafer handlers 406 may be capable of carrying a singlewafer or multiple wafers and may have transfer capability, such as inthe case where wafer handler 406 has the capability to pick a processedwafer and place an unprocessed wafer at the same module. Wafer handlers406 may travel through isolation valves 654 for direct tool to tool orbay to bay transfer or process to process transfer. Valves 654 may besealed valves or simply conductance type valves depending upon thepressure differential or gas species difference on either side of agiven valve 654. In this manner, wafers or substrates may be transferredfrom one process step to the next with a single handling step or “onetouch”. As a result, contamination due to handling is minimized.Examples of such pressure or species difference could be for example,clean air on one side and nitrogen on the other; or roughing pressurevacuum levels on one side and high vacuum on the other; or vacuum on oneside and nitrogen on the other. Load locks 656, similar to chambers118P4 in FIG. 5, may be used to transition between one environment andanother; for example between vacuum and nitrogen or argon. In otheraspects, other pressures or species may be provided in any number ofcombinations. Load locks 656 may be capable of transitioning a singlewafer handler or multiple wafer handlers in a manner substantiallysimilar to that described herein where a single drive line or multiplesubstantially parallel and/or orthogonal drive lines are provided.Alternately, substrate(s) may be transferred into load lock 656 onshelves (not shown) or otherwise where the wafer handler 406 is notdesired to pass through the valve. Additional features 658 such asalignment modules, metrology modules, cleaning modules, process modules(ex: etch, deposition, polish, etc.), thermal conditioning modules orotherwise, may be incorporated in lock 656 or the transport chambers.Service ports 660 may be provided to remove wafer handlers 406 or wafersfrom the tool. Wafer or carrier stockers 662, 664 may be provided tostore and buffer process and or test wafers. In other aspects, stockers662, 664 may not be provided, such as where carts are directed tolithography tools directly. Another example is where indexer or waferstorage module 666 is provided on the tool set. Recirculation unit 668may be provided to circulate and or filter air or the gas species in anygiven section such as tool section 612. Recirculation unit 668 may havea gas purge, particle filters, chemical filters, temperature control,humidity control or other features to condition the gas species beingprocessed. In a given tool section more or less circulation and orfilter or conditioning units may be provided. Isolation stages 670 maybe provided to isolate wafer handlers 406 and/or wafers from differentprocesses or tool sections that cannot be cross contaminated. Locks orinterconnects 672 may be provided to change wafer handler 406orientation or direction in the event the wafer handler 406 may pick orplace within a generic workspace without an orientation change. In otheraspects or methods any suitable combination of process sequences or makeup could be provided.

Referring now to FIG. 6, the controller 199 controls the propulsionforces, generated by the array of electromagnets 1700, across the base1510 so as to impart a controlled yaw moment on the base, yawing thebase 1510 about a yaw axis (e.g., axis of rotation 777), substantiallynormal to the drive plane 1598, from a first predetermined orientationrelative to the frame of the chamber 118 (such as where the end effector1520 is substantially aligned with drive line 177), to a seconddifferent predetermined orientation relative to the frame of the chamber118 (such as where the end effector is extended into process module120). As may be realized yawing of the base 1510 may be performed inconjunction with propulsion motion of the base 1510 (such as where asingle drive line is provided in the chamber 118) or with the base at apredetermined location (such as where the base 1510 is rotation whileremaining substantially stationary along the X and Y axes). In oneaspect, referring also for FIG. 15C, the controller 199 controls thepropulsion forces (e.g., Fx_(right), Fx_(left)), generated by the arrayof electromagnets 1700, so as to impart a moment couple (illustrated inFIG. 15C with movement of the substrate handler 1500 along the X axis)on the base 1510 effecting controlled yaw of the base 1510 so as toeffect at least one of positioning and centering of a substrate (alsoreferred to as a wafer payload or payload) on the base 1510 relative toa predetermined substrate holding location (such as a load lock, processmodule, etc.) of the frame of the chamber 118. As may be realized, pitch(rotation about Y axis) and roll (rotation about X axis) (see FIGS. 15Aand 15B) control may be effected with the controller 199 (controllinglift forces Fz across the reaction platen) simultaneously with yawmotion countering dynamic moment coupling and maintaining substantiallyflat yaw of the wafer holder/reaction platen in the wafer transferplane.

Where a single drive line 177 is provided in each transport chamber (asillustrated in FIGS. 1A, 1B, 2, 4, and 5) or where access to a processmodule, such as process module 120A (see FIG. 8) from a drive line 178closest to the process module 120A (such as when multiple substantiallyparallel longitudinal drive lines 177, 178 are provided—see FIG. 8), thecontroller 199 is configured to drive the base 1510 simultaneously intwo or more of yaw, pitch, roll, and in propulsion (as described herein)to pick and place substrates from any suitable substrate holdingstations (e.g. load locks 116, process modules 120, etc.). For example,the controller 199 is configured to energize the actuators 1700 asdescribed herein so that the base moves along the drive line 177 androtates about a base rotation axis 777 so that a substrate seatingsurface 1520A of the substrate handler 1520 enters a process module 120or other suitable holding station where the substrate S travels along asubstantially straight line path 790 in a predetermined wafer/substratetransfer plane. Referring to FIGS. 8-11, in other aspects, wheremultiple longitudinal drive lines 177, 178 are provided in the transportchamber 118 the base 1510 may be rotated so that the substrate handler1520 is aligned with a desired/predetermined substrate holding stationprior to entrance into the substrate holding station. For example, thebase 1510 may be positioned at an intersection between drive lines 178and 179A, where drive line 179 provides for extension and retraction ofthe substrate handler into substrate holding station 120BH of processmodule 120B (e.g., in a propulsion direction substantially orthogonal(or any suitable angle that enables access to the process module) to thepropulsion direction along drive lines 177, 178). The base 1510 may berotated about rotation axis 777 so that the substrate handler 1520 isaligned with the substrate holding station 120BH and the base may bemoved along drive line 179A to move or extend the substrate handler 1520into the substrate holding station 120BH for picking/placing asubstrate(s).

Referring to FIGS. 14 and 14A-14C, while the substrate handler 1500 hasbeen described as including an end effector 1520, in other aspects oneor more substrate handlers may be configured as a cart 1500C that isconfigured to support one or more substrates on the base 1510. Forexample, the base 1510 may include one or more substrate supports1431-1433 configured to stably hold a substrate (e.g., from the bottomor edge grip) so that substrate handlers 1500, 1500A, 1500B or substratetransports within, e.g., a load or other substrate holding station, maytransport substrate(s) to and from the substrate supports 1431-1433. Inone aspect, the substrate supports 1431-1433 may be configured tosubstantially center one or more substrates on the base 1510 (i.e., thesupports are self-centering supports, that are either passive supportsor may be actuated (e.g., piezo-electric) from a suitable power sourceenergized on the reaction platen) so that a center of the substrate(s)is substantially coincident with the axis of rotation 777 of the base.In some aspects, one or more of the carts 1500C may include a substratesupport rack 1440 for holding two or more substrates in a stack, whereeach rack level includes respective substrate supports 1431-1433,1431A-1433A. Referring to FIGS. 14 and 14A, the carts 1500C may providean interface between the substrate handlers 1500A, 1500B and the loadlocks 116 where a transport apparatus 116R (such as a SCARA arm, linearsliding arm, etc.) of the load lock transfers substrate(s) to the cart1500C and the substrate handlers 1500A, 1500B pick the substrates fromthe cart and vice versa. In other aspects, where the process module 120includes a transport apparatus 120R (such as a SCARA arm, linear slidingarm, etc.) the carts 1500C may be employed to transfer substrate(s) toand from the process module 120. While the base 1510 of the carts 1500C(and of the substrate handlers 1500, 1500A, 1500B) are illustrated ashaving a circular shape when viewed from the top (see FIG. 14C) in otheraspects, the base 1510 may have any suitable shape (e.g., square,rectangular, circular, etc. when viewed from the top) that otherwiseinterfaces with the array of electromagnets 1700 for effecting one ormore of linear propulsion, lift, yaw, pitch, roll, and rotation controlof the base 1510.

Referring to FIGS. 12A, 12B, 13A, 13B, while the transport chamber 118has been described above as a longitudinally extended chamber that formspart of a linear processing tool, in other aspects, the transportchamber may have a cluster tool configuration. For example, referring toFIGS. 12A and 12B the transfer chamber 118T1 has a substantially squareconfiguration (although in other aspects the transfer chamber may haveany suitable shape such as hexagonal, octagonal, etc.). In this aspectan electrical machine 1599R (substantially similar to the linearelectrical machine 1599) is configured as a side-by-side transportapparatus that includes at least two side-by-side substrate handlers1500A, 1500B that are substantially similar to substrate handler 1500described herein. The array of electromagnets 1700 in this aspect isconfigured to move the substrate handlers 1500A, 1500B so that thesubstrate handlers 1500A, 1500B rotate about common axis of rotation1277 (such axis being akin to a 0 axis of, for example, a conventionalSCARA type robot) for changing a direction of “extension and retraction”(the terms extension and retraction are being used herein forconvenience noting that the extension and retraction is effected bylinear propulsion movement of the substrate handler 1500, 1500A, 1500Balong a respective drive line) of the side-by-side transport apparatus.For example, the array of electromagnets 1700 has an arrangement thatforms drive lines 177, 178, 179, 180. Here drive lines 177, 178 arespaced from one another and substantially parallel to one other so as tobe substantially aligned with a respective transport openings 1180A,1180F and 1180B, 1180E. The drive lines 179, 180 are substantiallyorthogonal to drive lines 177, 178 and are spaced from one another andsubstantially parallel to one other so as to be substantially alignedwith a respective transport openings 1180C, 1180H and 1180D, 1180G. Thedrive lines can be in any suitable pattern (such as arced or curvedsegments with constant or varying radii) and orientation and thedescription that follows is for exemplary purposes. The electromagnets1700A-1700N (illustrated in FIG. 12A but not numbered for clarity of thefigure) provide for at least linear propulsion of the substrate handlers1500A, 1500B through the transport openings 1180A-1180H. In this aspect,the array of electromagnets 1700 also includes rotational electromagnetsub-arrays 1231-1234 that effect, under control of controller 199, withthe electromagnets that form the drive lines 177-180 the rotation of thesubstrate handlers 1500A, 1500B about the common axis of rotation 1277.Alternatively, the electromagnets may form a dense enough and largeenough grid without being specifically designated for propulsion orrotation and can perform that function based on the base's 1510 positionand the control law of the controller 199. As may be realized, while thesubstrate handlers 1500A, 1500B may rotate about the common axis ofrotation 1277 at the same time, extension and retraction of thesubstrate handler 1500A, 1500B may be independent of extension andretraction of the other one of the substrate handler 1500A, 1500B. Ingeneral, the motion of the substrate handler 1500A, 1500B is independentof each other and the complexity of that motion can range from onedegree of freedom to six degrees of freedom.

Referring to FIG. 12B, in one aspect, the electrical machine 1599Rincludes multiple transport levels 1220A, 1220B that are stacked oneabove the other. In this aspect, each level 1220A, 1220B is formed by arespective level support 1221 each having a respective reference plane1299R that is substantially parallel with the level reference plane 1299of the transport chamber 118T1 frame. Each level support 1221 includesan array of electromagnets 1700 substantially similar to thatillustrated in FIG. 12A for linearly driving the side-by-side substratehandlers 1500A, 1500B along drive lines 177-180 and rotating the side byside substrate handlers 1500A, 1500B (e.g., with full six degree offreedom control) about the common axis of rotation 1277. Each levelsupport 1221 is coupled to a common Z axis drive 1211 that moves thelevel supports 1221 and the substrate handlers 1500A, 1500B thereon inthe Z direction so as to align the end effectors 1520 of the substratehandlers 1500A, 1500B on the respective level supports 1221 with asubstrate transport plane 1290 of the transport openings 118O of thetransport chamber 118T1. The Z axis drive 1211 may be any suitablelinear actuator such as a screw drive, electromagnetic drive, pneumaticdrive, hydraulic drive, etc.

In another aspect referring to FIGS. 13A and 13B the transfer chamber118T2 has a substantially hexagonal configuration (although in otheraspects the transfer chamber may have any suitable shape as notedherein). In this aspect the electrical machine 1599R (substantiallysimilar to the linear electrical machine 1599 of FIG. 15C) is configuredas a radial transport apparatus that includes a substrate handler 1500having a double ended/sided end effector 1520D, as will be describedherein (although in other aspects a single ended/sided end effector maybe employed). The array of electromagnets 1700 in this aspect isconfigured to rotate the substrate handler 1500 about axis of rotation1377 (such axis being akin to a θ axis of, for example, a conventionalSCARA type robot) for changing a direction of “extension and retraction”(the terms extension and retraction are being used herein forconvenience noting that the extension and retraction is effected bylinear propulsion movement of the substrate handler 1500 along arespective drive line), and linearly propel the substrate handler 1500so as to extend through the transport openings 1180A-1180F. For example,the array of electromagnets 1700 has an arrangement that forms radiallyoffset drive lines 177, 178, 179, where an angle α between adjacentdrive lines depends on the number of sides/facets of the transportchamber 118T2 on which the transport openings 1180A-1180F are located.The electromagnets 1700A-1700N (illustrated in FIG. 12A but not numberedfor clarity of the figure) provide for at least linear propulsion of thesubstrate handler 1500 through the transport openings 1180A-1180H androtation of the substrate handler 1500 about axis of rotation 1377 withfull six degree of freedom control so as to maintain linear transportand rotation in a desired attitude in pitch and roll.

Referring to FIG. 13B, in one aspect, the electrical machine 1599Rincludes multiple transport levels 1320A, 1320B that are stacked oneabove the other in a manner substantially similar to that describedabove with respect to FIG. 12B. For example, each level 1320A, 1320B isformed by a respective level support 1321 each having a respectivereference plane 1299R that is substantially parallel with the levelreference plane 1299 of the transport chamber 118T1 frame. Each levelsupport 1321 includes an array of electromagnets 1700 substantiallysimilar to that illustrated in FIG. 13A for linearly driving (alongdrive lines 177-179) and rotating (about axis 1377) the substratehandler 1500. Each level support 1321 is coupled to a common Z axisdrive 1311 (that is substantially similar to Z-axis drive 1211) thatmoves the level supports 1321 and the substrate handler 1500 thereon inthe Z direction so as to align each of the end effector 1520D of thesubstrate hander 1500 on the respective level supports 1321 with asubstrate transport plane 1390 of the transport openings 118O of thetransport chamber 118T2.

Referring to FIGS. 12B and 13B, the vertical motion provided by the Zactuator 1211 can be used for enabling the wafer handler 1220A or 1220Bto perform wafer handoff operations such as pick or place to/from awafer process station. The supports 1221, 1321 can include a singlemodule (level) with the purpose of providing additional elevationcapability to the wafer handler 1220A, 1220B to achieve larger verticalstrokes during the wafer handoff operations. For example, in the case ofprocess modules or load locks that have more than one stacked waferslot, it would be advantageous to have a vertical lift apparatus such asZ-axis actuator 1211, 1311 to be able to reach each of the stacked waferslots without increase of applied levitation power provided by theelectrical machine 1599R.

Referring to FIGS. 12A and 12B, the vertical lift apparatus (or Z-axisactuator) 1211 and level 1221, in another aspect, has dual (or more)separate and independently operable apparatus, e.g., one for each waferhandler 1520. This would give the ability to perform independentvertical strokes for different wafer handlers that can access differentslots on at least two independent stations (e.g., process modules, loadlocks, etc.).

Referring now to FIGS. 15A, 15B, 15C, 16A, 16B, 16C the linearelectrical machine 1599 will be described in greater detail (againnoting that the electrical machine 1599R is substantially similar to thelinear electrical machine 1599). Generally, the linear electricalmachine 1599 includes a structure 1500 without magnets and any movingparts such as bearings, revolute or prismatic joints, metal bands,pulleys, steel cables or belts. As noted above, the base 1510 is formedof a paramagnetic material, diamagnetic material, or a non-magneticconductive material. The base 1510 may have any suitable shape and sizefor cooperating with the electromagnets 1700A-1700 n of the array ofelectromagnets 1700 so as to stably transport substrates S in themanner(s) described herein. In one aspect, as illustrated in FIGS. 9 and11-16C the base 1510 is shown with a frusto-conical shape where thetapered side 1510TS of the frustum 1510FR face the array ofelectromagnets 1700 (although other suitable shapes are operative). Herethe tapered side 1510TS of the frusto-conical shape have an angle A (seeFIG. 15B) that is between about 500 and about 60° relative to the planarsurfaces of the frustum 1510FR; while in other aspects the angle A maybe greater than about 60° or less than about 50°. In other aspects, thebase may have a frusto-pyramidal shape as shown in FIGS. 8, 8A, and 10.Here each side 1510TSP of the frustum 1510FRP have an angle A (see FIG.8B) that is between about 50° and about 60° relative to the planarsurfaces of the frustum 1510FRP; while in other aspects the angle A maybe greater than about 60° or less than about 50°. While thefrusto-pyramidal shape is illustrated as having four sides, in otheraspects the frusto-pyramidal shape may have any suitable number ofsides, such as, for example, six or eight sides or may be round or havecurved sides. In other aspects, the base 1510 may not have afrusto-conical or frusto-pyramidal shape and it may comprise of a planarshape with suitable and asymmetric contour and size in order to beproperly controlled by electromagnets 1700.

The end-effector 1520, 1520D may be substantially similar toconventional end effectors; however, as described herein the endeffector is rigidly coupled to the base 1510. As an example, the endeffector may be a single sided/ended (see end effector 1520) with asingle substrate holding location 1520A, a double sided/ended (see endeffector 1520D) with two longitudinally spaced apart substrate holdinglocations 1520A, 1520B, a side-by-side configuration where multiplesubstrate holding locations are arranged side-by-side (e.g., laterallyspaced apart) and supported from a common base so as to extend throughside-by-side substrate transport openings, a stacked configuration weremultiple substrate holding locations are arranged in a stack one abovethe other and supported from a common base so as to extend throughvertically arrayed substrate transport openings, while in other aspectsthe end effector may have any suitable configuration. The end effector1520, 1520D may be made of materials that can one or more of withstandhigh temperatures, have low mass density, have low thermal expansion,have low thermal conductivity and have low outgassing. A suitablematerial from which the end effector 1520, 1520D may be constructed isAlumina Oxide (Al₂O₃), although any suitable material may be used.

In one aspect, the end-effector 1520, 1520D is coupled to the base 1510with a substantially rigid and unarticulated stanchion 1510S so as toset the end-effector 1520, 1520D at a suitable nominal height H2relative to, for example, the level reference plane 1299. The substratehandler 1500, as described herein, is moved in space (in at least threedegrees of freedom) using electrodynamic levitation principles. Theactuation elements (e.g., actuators 1700), as shown in FIGS. 15A-15C,16B, and 16C include independently controlled coils or electromagnetics1700A-1700 n (also referred to herein as coil segments) that generatedesired magnetic field that induces thrust and lift force vectors in thebase 1510.

In some aspects, referring to FIGS. 10, 10A, 11, and 11A, multiplesubstrate handlers may be nested with respect to each other so as totravel linearly along the drive lines 177-180 as a single unit with theend effectors 1520 of the nested substrate handler disposed in a stackone above the other. For example, referring to FIGS. 10 and 10A thenested bases 1510FP (may be symmetrical as a body of revolution,revolute symmetry e.g., frusto-conical, or bi-symmetrical, e.g.,frusto-pyramidal, or a channel shaped cross section of which areillustrated in FIG. 10A) are configured so that one base 1510FP may beinserted into another base 1510FP so as to stack the bases 1510FP in amanner similar to that of stacking cups one inside the other. The bases1510FP may be configured so that when stacked the vertical space betweenend effectors 1520 (e.g., when the end effectors 1520 are substantiallylevel with the level reference plane 1299) is substantially the same asa vertical space between stacked substrate holding stations so as toprovide for simultaneous picking and placing of substrates by thestacked end effectors 1520. The stacking of the bases 1510FP provides,in one aspect, depending on the levitation forces generated by the arrayof electromagnets 1700, independent vertical or Z-axis movement of atleast one of the bases 1510FP (and the respective substrate handler1500A, 1500B the base is part of). In this example, the uppermostsubstrate handler 1500B may be moved in the Z-axis independent of thelowermost substrate handler 1500A; however, when the uppermost substratehandler 1500B is lifted away from the lowermost substrate handler 1500A,the lowermost substrate handler 1500A may also be moved in the Z-axisdirection independent of the uppermost substrate handler 1500B. Here,bi-symmetrical bases are interlocked and rotation of the substratehandlers 1500A, 1500B is linked by virtue of the shape of the bases1510FP so that the substrate handlers 1500A, 1500B rotate in unison. Thestackable configuration of the bases 1510FP provides for the stacking ofany suitable number of substrate handlers one above the other (in thisexample two are shown stacked one above the other but in other aspectsmore than two substrate handlers may be stacked one above the other).

Referring to FIGS. 11 and 11A, the revolute symmetry bases 1510FC may bestacked one above the other, moved in the propulsion direction, andmoved relative to each other along the Z-axis in a manner substantiallysimilar to that described above with respect to the frusto-pyramidalbases 1510FP. However, in this aspect, the revolute symmetry shape ofthe bases 1510FC does not interlock and provides for independentrotation of each substrate handler 1500A, 1500B about substrate handleraxis of rotation relative to another of the substrate handlers 1500A,1500B. Independent rotation of the frusto-conical based substratehandlers 1500A, 1500B effects a fast swapping of substrates from asingle substrate holding station such as where end effector 1520 ofsubstrate handler 1500A is aligned with substrate holding station 120BHfor picking substrate S1, where end effector 1520 of substrate handler1500B is rotated to a position so as to not extend into the substrateholding station 120BH. Once the substrate S1 is removed from substrateholding station 120BH by substrate handler 1500A, the positions of theend effectors 1520 of the substrate handlers may be swapped so that endeffector 1520 of substrate handler 1500B is aligned with the substrateholding station 120BH for placing substrate S2 at the substrate holdingstation 120BH while end effector 1520 of substrate handler 1500A isrotated to a position so as to not enter the substrate holding station120BH. As may be realized, the substrate handlers 1500A, 1500B may bemoved along the Z-axis to accommodate the stacked heights of the endeffectors relative to a height of the substrate holding station 120BH.Though symmetrical (revolute about one or more axis) bases have beenillustrated, in other aspects one or more bases may be asymmetrical orlacking any axis of symmetry.

As described herein linear propulsion is generally provided by twoparallel linear tracks 1550 (may be a single track) of independentlycontrolled electromagnets 1700A-1700 n. The number of electromagnets1700A-1700 n are spaced apart from one another depending on dimensionsof the base 1510 so as to control all six degrees of freedom (roll,pitch, yaw, and translation in each of the X, Y, Z directions) of thesubstrate handler in space. For example, as illustrated in FIG. 15B, theelectromagnets 1700A-1700 n may be spaced apart from each other so thattwo or more electromagnets 1700A-1700 n (cooperating so as to form amotor actuator (primary) 1701 and in combination with the base(secondary) 1510 the motor) of each parallel linear track 1550 aredisposed underneath the base 1510 at all times in the direction ofmotion of the base so as to stably levitate and propel the base 1510 (asmay be realized, FIGS. 15A, 15B schematically illustrate arepresentative configuration of the system, and are provided to showgenerally an exemplary representation of the interrelationship betweenthe base 1510 and the electromagnets 1700A-1700 n, and is not intendedas limiting in any way. The size, numbers, and spacing (e.g., pitch) ofthe electromagnets 1700A-1700 n in both the X and Y axes may vary, asmay the size and shape of the base 1510 in relation to theelectromagnets 1700A-1700 n. In one aspect, as illustrated in FIG. 8,the array of electromagnets 1700 may also include stabilization tracks1550S disposed laterally outward of the tracks 1550. The stabilizationtracks may be substantially similar to the tracks 1550 and areconfigured to provide additional stabilization of the base 1510 throughthe generation of additional lift and/or propulsion forces (e.g., inaddition to the lift and propulsion forces generated by electromagnetsof the parallel linear tracks 1550) that act on the base 1510. Theresult is a substrate handler 1500 that can move along a direction ofthe tracks 1550 (i.e., the propulsion direction) while changingorientation in one or more of roll, pitch and yaw. According to magneticinduction principles where the electromagnets 1700A-1700 n are akin tothe “primary” and the base 1510 corresponds to the “secondary” whereelectrical currents are induced by means of Eddy current effects.

FIG. 17 shows an actuator control system network 1799, in accordancewith an aspect of the disclosed embodiment, configured to effectindividual control of each electromagnet 1700A-1700 n to provide thedesired force components and degrees of freedom described andillustrated with respect to FIGS. 15A-16C. In one aspect, the actuatorcontrol system is configured so that the electromagnets 1700A-1700 nform motor actuator units (collectively referred to as the motoractuator), each motor actuator unit having m number ofelectromagnets/coils cooperating to form the motor (where m is adynamically selectable number of two or more electromagnets forming oneor more of the motor actuator units as will be described further below).The actuator control system network 1799 is thus a scalable motioncontrol system that has a clustered architecture with at least a mastercontroller 1760 and distributed local drive controllers 1750A-1750 n aswill be described in greater detail below. In this aspect, groups ofelectromagnets 1700G1-1700Gn are coupled to a respective local drivecontroller 1750A-1750 n that is configured to control the electricalcurrents on electromagnet 1700A-1700 n within the respective group ofelectromagnets 1700G1-1700Gn. The local drive controller 1750A-1750 ncan be a “slave” in a network that is connected to a master controller1760 that is configured to specify the desired forces (e.g., thrust andlift) for each individual electromagnet 1700A-1700 n to effect thedesired motion of the substrate handler 1500 in space. As will bedescribed herein, the electromagnets 1700A-1700 n can be physicalelectromagnets/coils that can be dynamically configured when it comes tothe respective “phase” definitions of each coil with respect to “phase”definitions of the other electromagnets/coils of the given motoractuator unit so that the position of the given motor actuator unit(formed of cooperative excitation phases of the motor under propulsion)may be deemed as moving virtually in unison with the base propulsion,though the physical electromagnets/coils are fixed (e.g., static) aswill be described further below. This provides continuity in the desiredforce vectors for motion control of the substrate handler.

In accordance with aspects of the disclosed embodiment, and referring toFIGS. 18 and 19, position feedback sensors 2000 are distributed on theframe of the chamber 118. The sensors 2000 are configured for sensingposition of the base 1510 along the drive plane 1598 and arecommunicably coupled to the controller 199 so the controller 199registers the sensed position of the base 1510, wherein the controller199 is configured to sequentially excite the electromagnets 1700A-1700 nof the array of electromagnets 1700 corresponding to the sensed positionin the manner described herein.

FIGS. 18 and 19 illustrate a sensor control system network 1899, inaccordance with an aspect of the disclosed embodiment, that isconfigured to provide position feedback of the substrate handler 1500 inspace, e.g., relative to the frame of the transport chamber 118. Thesensor control system network 1899 may be a scalable sensor controlsystem that has a clustered architecture with at least the mastercontroller 1760 and distributed local sensor controllers 1850A-1850 n aswill be described in greater detail below. In this aspect, groups ofsensors 1800G1-1800Gn are coupled to a respective local sensorcontroller 1850A-1850 n (also referred to herein as a sensor processingunit) that is configured as a “slave” in a network that is connected tothe master controller 1760 (or other suitable master controller incommunication with master controller 1760). Each of the local sensorcontroller 1850A-1850 n includes a central processing unit 1851 andassociated hardware interfaces 1852 that can support different types ofsensor technologies such as those described herein. The local sensorcontroller 1850A-1850 n can be integrated into a real time network suchas EtherCat and/or a non-real time network such as Ethernet or similar.The sensors 2000 can be distributed along the propulsion path (e.g.,drive lines 177-180) of the substrate handler so as to detect thelocation/position of the substrate handler in space, e.g., relative tothe frame of the transport chamber 118.

FIG. 20 illustrates a distributed sensor arrays 2001 that includessensors 2000A-2000 n relative to a substrate handler 1500 base 1510 andhow the relationship between characteristic dimensions of the base 1510and the sensors 2000A-2000 n that effects a continuous feedback of theposition of the substrate handler 1500. As can be seen in FIG. 20, thesensors 2000A-2000 n are disposed at a predetermine intervals or sensorpitch Ps where a sensor spacing A is provided between adjacent sensors2000A-2000 n. Each sensor 2000A-2000 n has a length so as to provide apredetermined sensing range Ls and the base 1510 has a length Lb. Therelationship between these characteristics to provide continuousfeedback is:

Ls/2>Ps−Ls=>Ps<(3/2)Ls  [2]

where the length Lb of the base 1510 is:

Lb=nPs+Ls/2 (where n=1,2,3, . . . )  [3]

In accordance with aspects of the disclosed embodiment, each sensor2000A-2000 n includes any suitable device(s) that can measure thelongitudinal displacement and/or the air gap between the substratehandler 1500 base 1510 and a bottom reference surface, such as the levelreference plane 1299 (see, e.g., FIG. 15A). The Master Controller 1760is configured to track the location of the substrate handler 1500 bydictating which local sensor controller 1850A-1850 n should be activelyreporting feedback from the appropriate sensors 1700A-1700 n. Thecombination of the actuator control system network 1799 and the sensorcontrol system Network 1899 forms a motion control infrastructure forthe six degrees of freedom of the substrate handler 1500 as shown inFIGS. 15A-16C.

Referring to FIG. 39, a control system network 3999 that has a clusteredarchitecture representative of the actuator control system network 1799and the sensor control system network 1899 will be described. In theexample illustrated in FIG. 39, there are three drive lines 177, 179A,179B, each having respective array of electromagnets forming respectivetracks 1550A-1550F (though shown as linear, may be arcuate). Forexample, drive line 177 is formed by tracks 1550A and 1550B havingelectromagnets 177ER1-177ERn and 177EL1-177ELn. Drive line 179A isformed by tracks 1550C and 1550D having electromagnets 179AER1-179AERnand 179AEL1-179AELn. Drive line 179B is formed by tracks 1550E and 1550Fhaving electromagnets 179BER1-179BERn and 179BEL1-179BELn. Theconfiguration of the electrical machine illustrated in FIG. 39 isexemplary and may have any other suitable configuration.

In FIG. 39 the control system network includes the master controller1760, cluster controllers 3950A-3950C and local controllers 1750DL,1750DLA, 1750DLB, 1850DL, 1850DLA, 1850DLB. Local controller 1750DLcorresponds to drive line 177, local controller 1750DLA corresponds todrive line 179A, and local controller 1750DLB corresponds to drive line179B. Each of the local controller(s) 1750DL, 1750DLA, 1750DLB issubstantially similar to distributed local drive controllers 1750A-1750n so that each drive line 177, 179A, 179B includes a distributedarrangement of local drive controllers 1750A-1750 n as described abovewith respect to FIG. 17 for controlling respective groups 1700G1-1700Gnof electromagnets 1700A-1700 n. Similarly, Local controller 1850DLcorresponds to drive line 177, local controller 1850DLA corresponds todrive line 179A, and local controller 1850DLB corresponds to drive line179B. Each of the local controller(s) 1850DL, 1850DLA, 1850DLB issubstantially similar to distributed local sensor controllers 1850A-1850n so that each drive line 177, 179A, 179B includes a distributedarrangement of local sensor controllers 1850A-1850 n as described abovewith respect to FIG. 18 for controlling respective groups 1800G1-1800Gnof sensors 2000A-2000 n.

In one aspect, as shown in FIG. 39 each of the local controllers 1750DL,1750DLA, 1750DLB, 1850DL, 1850DLA, 1850DLB is connected (e.g., through awireless and/or wired connection) to a respective cluster controller3950A-3950C. For example, each of the local controllers 1750DL, 1850DLof drive line 177 are coupled to cluster controller 3950B, each of thelocal controllers 1750DLA, 1850DLA of drive line 179A are coupled tocluster controller 3950A, and each of the local controllers 1750DLB,1850DLB of drive line 179B are coupled to cluster controller 3950C. Inother aspects, the local controllers may be connected (e.g., through awireless or wired connection) directly to the master controller 1760 asshown in FIGS. 17 and 19). In still other aspects, the local controllersmay be connected (e.g., through a wireless or wired connection) to boththe master controller 1760 and the respective cluster controller3950A-3950C to provide redundant substantially failsafe control of thelocal controllers.

Each of the cluster controllers 3950A-3950C are connected (e.g., througha wireless or wired connection) to the master controller 1760. Each ofthe master controller 1760, cluster controllers 3950A-3950C, and localcontrollers 1750DL, 1750DLA, 1750DLB, 1850DL, 1850DLA, 1850DLB includesany suitable processors and non-transitory computer program code toeffect motion control of the substrate handlers 1500 as describedherein. The master controller 1760 supervises the overall operation ofthe control system network 3999, each of the cluster controllers3950A-3950C supervises the operations of the respective localcontrollers 1750DL, 1750DLA, 1750DLB, 1850DL, 1850DLA, 1850DLB, and eachlocal controller 1750DL, 1750DLA, 1750DLB, 1850DL, 1850DLA, 1850DLB isutilized to drive the electromagnets and/or provide position feedback(of a substrate handler 1500) corresponding to the respective drivelines 177, 179A, 179B.

The clustered architecture provides the features of a centralizedcontrol network and the features of a distributed control network whererequired, within the network topology. The architecture as disclosedherein is advantageous because clusters may be distributed whererequired within the network, and each cluster controller 3950A-3950C iscapable of providing highly centralized control within the cluster itmanages. Network traffic associated with highly centralized control isgenerally confined within each cluster and local controllers 1750DL,1750DLA, 1750DLB, 1850DL, 1850DLA, 1850DLB may be located close toelectromagnets or sensors to which they control, reducing problemsassociated with power and signal cabling. In addition, the clusteredarchitecture allows for direct control of the local controllers 1750DL,1750DLA, 1750DLB, 1850DL, 1850DLA, 1850DLB by the master controller 1760where required. Furthermore, because intense network traffic isgenerally confined within the clusters, and the clusters are capable ofa high level of control, the architecture may accommodate a large numberof clusters. Thus, the architecture provides a high level of scalabilityand allows for an efficient distribution of controllers. It is notedthat while a clustered control architecture is described above,clustered architecture is merely an example of a suitable controlarchitecture, although any suitable control architecture may beemployed.

In another aspect of the disclosed embodiment, the local controllers1750DL, 1750DLA, 1750DLB, 1850DL, 1850DLA, 1850DLB shown in FIG. 39 canbe directly connected to the master controller 1760. In this aspect, themaster controller software is responsible for (e.g., the mastercontroller is configured to control) several aspects of the real timecontrol of the wafer handler's motion and the local controllers would beresponsible (e.g., configured for) all low level feedback and actuationaspects of the control architecture.

Still referring to FIG. 39 and also to FIGS. 15A-16C, in accordance withaspects of the disclosed embodiment, the processor 3901 of the mastercontroller 1760 is programmed with a dynamic model 3910 of the base 1510(e.g., the dynamic model is stored in any suitable memory 3902accessible by the processor 3901) with a payload (e.g., substrate(s) S)thereon and without a payload. The processor 3901 is also programmedwith a dynamic model 3911 of frictional forces p between the substrate Sand the end effector 1520. A form factor 3912 of the machine electronics(e.g., number of electromagnets, spacing between electromagnets, numberof drive lines and their respective orientations, propulsion to liftrelationship, etc.) relative to the base 1510 may also be stored inmemory 3902 and accessible by the processor 3901.

The master controller 1760 is programmed or otherwise configured todetermine kinematic motion of the base 1510 from an initial substratehandler pose to a final substrate handler pose. The master controller1760 is also programmed or otherwise configured to determine thekinematics of attitude/yaw control (in three degrees of freedom—pitch,roll, yaw) related to the determined kinematic motion. In one aspect,the kinematic motion and the kinematics of attitude/yaw are determinede.g., using one or more of dynamic model 3910, dynamic model 3911 andform factor 3912 in combination with a predetermined substrate processrecipe (e.g., where and when the substrate is to be transferred and whatprocess is to be performed on the substrate).

One method for controlling a machine such as the electrical machinesdescribed herein is to calculate a trajectory for each of propulsion(along the X and/or Y axes), lift (along the Z axis), roll, pitch, yaw.Such trajectories can be conveniently defined by a series of position,velocity and time values grouped into frames, referred to as PVT frames.

FIG. 40A shows an exemplary PVT frame 4005. The PVT frame 4005 includesposition data 4010 (which may include start location (X,Y,Z), endlocation (X,Y,Z), and attitude (roll, pitch, yaw), velocity data 4015,and time data 4020. In one aspect the data is in binary format groupedtogether in one or more bytes. In another aspect each of the positiondata 4010, velocity data 4015, and time data 4020 occupies four bytes(while in other aspects the each of the position data 4010, velocitydata 4015, and time data 4020 occupies more or less than four bytes).PVT frame 4005 may optionally include header information 4025 andtrailing information 4030, both of which may include identification,parity, error correction, or other types of data. PVT frame 4005 mayinclude additional data of varying lengths or amounts between or amongthe header, position, velocity, time, and trailing data. It should benoted that the PVT frame 4005 is not limited to any particular length.In other aspects, the PVT frame is either reduced to a PT frame or a Pframe only. The communication from the master controller 1760 to thecluster/local controllers 1750DL, 1750DLA, 1750DLB, 1850DL, 1850DLA,1850DLB may include different sets of values, which are peripherallyrelated to the desired motion, for example, these values could befrequencies, phase offsets, current values and/or voltage values of theelectromagnets/coil under control. The master controller 1760 implementsthe desired algorithmic transformation, calculates and streams via themotion network such quantities (effectively to every coil through anhierarchical scheme of cluster and local controllers).

It is a feature of the aspects of the disclosed embodiment to use theseseries of values as inputs for the dynamic models 3910, 3911 of thecontrolled electrical machine to calculate theoretical lift forces andpropulsion forces to be applied by predetermined electromagnets1700A-1700 n so that the base 1510 follows the desired trajectory. It isalso a feature of the aspects of the disclosed embodiment to useelements of the dynamic models 3910, 3911 to scale feedback controlsignals used by the local controllers 1750DL, 1750DLA, 1750DLB, 1850DL,1850DLA, 1850DLB for each electromagnet under their control.

The lift forces, propulsion forces, and scaling terms may advantageouslyaccount for non linearities and dynamic cross coupling among individualdrive lines 177, 179A, 179B. The lift forces, propulsion forces may bereferred to herein as feedforward terms and the scaling term may bereferred to as a gain term.

Using the electrical machine 1599 shown in FIG. 39 (also referring toFIGS. 15A-16C) as an example, the master controller 1760 may generate atrajectory for each drive line 177, 179A, 179B, along which a substratehandler 1500 is to travel, in terms of a commanded position, velocityand acceleration. Using an inverse kinematic model of one or more of thebase 1510 and/or frictional forces p, the master controller 1760 mayutilize the trajectory information to generate correspondingfeedforward, and gain terms. These terms may be grouped together withthe trajectory information in frames specific to each drive line 177,179A, 179B, referred to as PVT-FG frames. FIG. 40B illustrates anexemplary PVT-FG frame 4095. PVT-FG frame 4095 includes optional header4025, position data 4010, velocity data 4015, time data 4020, andoptional trailing information 4030, similar to PVT frame 4005. Inaddition, PVT-FG frame 4095 includes at least one feedforward term 4050and at least one gain term 4060. The data may be in binary formatgrouped together in one or more bytes. In one aspect of the PVT-FG frame4095 the position data 4010, velocity data 4015, time data 4020,feedforward term 4050, and gain term 460 each occupy four bytes (whilein other aspects they may each occupy more or less than four bytes).Similar to PVT frame 4005, PVT-FG frame 4095 may include other data ofvarying lengths or amounts, distributed among or between the variousterms.

The PVT-FG frames may (or in other aspects the PVT frames) then bedistributed over the control system network 3999. The clustercontrollers 3950A-3950C, receive the data, and may interpolate betweentwo consecutive frames to obtain an instantaneous position, velocity,feedforward term and gain value, and utilize this information to effectcontrol of the substrate handler 1500. For example, each clustercontroller 3950A-3950C employs the PVT-FG frames (or in some aspects thePVT frames), or other suitable information/commands, from the mastercontroller 1760 to generate the propulsion forces Fx (propulsion forcealong the X axis), Fy (propulsion force along the Y axis), and liftforce Fz (along the Z axis) to effect one or more of levelling,propulsion, and three degree of freedom attitude control (e.g., roll,pitch, yaw) of the substrate handler 1500 and base 1510 thereof. In someaspects, the form factor 3912 of the machine electronics may beprogrammed at the cluster controller 3950A-3950C level, rather than orin addition to being programmed in the master controller 1760, where theform factor is used to establish the lift to propulsion relationship(s),and with the data provided by the master controller 1760 to generate thelift and propulsion forces noted above. In other aspects, the clustercontrollers 3950A-3950C and local controllers 1750DL, 1750DLA, 1750DLB,1850DL, 1850DLA, 1850DLB may receive corresponding data from the mastercontroller 1760, and utilize the data to control the electromagnets1700A-1700 n and movement of the substrate handler 1500 along one ofmore of the drive lines 177, 179A, 179B.

The cluster controllers 3950A-3950C (or alternatively the localcontrollers 1750DL, 1750DLA, 1750DLB, 1850DL, 1850DLA, 1850DLB) commandelectromagnet 1700A-1700 n modulation, which commands are sent to andreceived by the respective local controllers 1750DL, 1750DLA, 1750DLB,1850DL, 1850DLA, 1850DLB, to effect one or more of dynamic phaseallocation and the creation of virtual multiphase motor actuator unitsas described in greater detail herein.

FIG. 21 illustrates an exemplary controlled motion(s) of the substratehandler 1500 in accordance with aspects of the disclosed embodiment withrespect to increased substrate handler throughput while carrying asubstrate S. Here, the controller 199 controls the levitation forces(e.g., FZ_(T), FZ_(L)), generated by the array of electromagnets 1700,so as to impart differential levitation forces (illustrated in FIG. 21)across the base 1510 that effect a controlled inclination (e.g., e+ ore−) of the base 1510, relative to the drive plane 1598, that controls apredetermined reaction platen attitude in at least one of pitch (shownin FIGS. 15B, 21 and 27) and roll (shown in FIGS. 15A and 29). In oneaspect, the controller 199 controls the levitation forces (e.g., FZ_(T),FZ_(L)), generated by the array of electromagnets 1700 of the motoractuator units (that are virtually moving), so as to effect apredetermined bias attitude BA+ or BA− of the base 1510, relative to thedrive plane 1598, that imparts a bias reaction force F2 (FIG. 23), froma base payload seating surface (e.g., such as a substrate seatingsurface 1520SS (FIGS. 23, 25A, 25B) of the end effector 1520 or aseating surface defined by substrate supports of cart 1431-1433 of cart1500C) on a substrate S supported by the base seating surface, in adirection countering payload inertial force arising from acceleration ofthe reaction platen along the drive plane 1598. The controller 199 isconfigured to determine acceleration of the base 1510 (and the substratehandler thereof) along the drive plane 1598 at least from changes in theposition of the base 1510 sensed by the sensors 2000, and in response tothe acceleration determined, control the bias attitude of the base 1510to provide the predetermined bias attitude countering the payloadinertial force arising from the acceleration of the base 1510. In otheraspects the controller 199 may apply a predefined acceleration fromcommanded trajectory for bias attitude control. Here, the controller 199controls excitation of the electromagnets 1700A-1700 n of the virtuallymoving motor actuator units of the array of electromagnets 1700 so as toset the bias attitude BA+ or BA− to bias the base 1510 against inertialforces tending to displace a substrate S, seated against the base 1510(e.g., on an end effector 1520 thereof or substrate supports 1431-1433thereof), relative to the base 1510 along a seat between the substrate Sand the base 1510 (see, e.g., FIGS. 23, 25A, 25B).

As an example of countering payload inertial forces, starting at theleft-hand side of FIG. 21, a substrate handler 1500 (which may be any ofthe substrate handlers described herein) is depicted at a starting pointof a motion in direction 2122 in FIG. 21. As the substrate handlerbegins to move, a set of propulsion force vectors FP and lift forcevectors FZ are generated by the Control System (e.g., the actuatorcontrol system network 1799 and the sensor control system Network 1899which may be part of controller 199) so as to cause the substratehandler 1500 to accelerate in the motion direction with an increasedPitch angle e+ (e.g., the end effector 1520 is tilted in, e.g., aclockwise direction). To effect the increased pitch angle e+ the liftforce vectors FZ are generated so that a magnitude of a trailing liftforce vector FZ_(T) is larger than a magnitude of a leading lift forcevector FZ_(L) (where leading and trailing are in reference to the motiondirection). As the substrate handler reaches approximately its halfwaypoint towards the end of the motion (e.g., such as where there issubstantially zero acceleration of the substrate handler 1500), thepitch angle e+ is reduced in magnitude so that the tilted orientation ofthe end effector 1520 is reversed from the clockwise orientation to zero(e.g., substantially parallel with the level reference plane 1299—thetrailing lift force vector FZ_(T) and the leading lift force vectorFZ_(L) are substantially equal). At this point in the trajectory, thesubstrate handler 1500 motion begins a deceleration stage where thepitch angle e− is decreased so that the end effector 1520 pitches to acounter clockwise orientation. To effect the decreased pitch angle e−the lift force vectors FZ are generated so that the magnitude of thetrailing lift force vector FZ_(T) is less than a magnitude of theleading lift force vector FZ_(L)). As the substrate handler 1500 reachesits final destination, the pitch angle e− is increased to zero so thatthe tilted orientation of the end effector 1520 is substantiallyparallel with the level reference plane 1299, as in the start of themotion.

As may be realized, while the pitch of the end effector is increased ordecreased to account for acceleration and deceleration of the substratehandler 1500 substantially without slippage of the substrate S relativeto the end effector while travelling along a substantiallystraight/linear path (such as along drive lines 177-180), in otheraspects, the roll r and/or pitch e of the substrate handler 1500 may beincreased or decreased to provide for higher rotational accelerations ofthe substrate handler 1500 (such as about one or more of axes 777, 1277,1377 in a manner substantially similar to that described above withrespect to the linear motion (see FIG. 21A which illustrates rolling ofthe end effector in rotation direction with roll control as shown inFIG. 15A where lift force vector FZ_(left) is greater than lift forcevector FZ_(right)).

The motion control illustrated in FIG. 21 effects a substantially fastersubstrate motion transport (e.g., provides for higher accelerationssubstantially without substrate slippage relative to the end effector)when compared to conventional substrate transport where the end effectoris parallel with the wafer transfer plane throughout end effectormotion. As an example, if the pitch angle e of FIG. 21 is set to be zero(as with conventional substrate transports) during the entire motionthen the maximum allowable propulsion acceleration is limited to thestatic coefficient of friction (p) between the substrate S and a contactsurface of the end effector 1520. This is illustrated in FIG. 22, whichconstitutes the typical use case in a conventional substrate transportwhere the substrate S is held by its back side in contact with theend-effector. As it can be seen in FIG. 22, the maximum accelerationimposed to the substrate S is μg before wafer slippage takes place.Where “g” is the acceleration of gravity (about 9.8 m/S²), p is thecoefficient of friction, M is the mass of the substrate, W is the weightof the substrate, and N is the normal force.

FIG. 23 illustrates the case where the substrate S (having a mass m) iscarried by substrate handler 1500 (having a mass M) with a pitch angle ewhile the substrate handler 1500 is accelerated in the X direction. Theforce diagrams in FIG. 23 illustrate the dynamics of the motion of thesubstrate S and substrate handler 1500. In FIG. 23, the substrate hander1500 is accelerated along the propulsion direction X with accelerationa. As a result, the force at the substrate handler is represented by thevariable F1. The acceleration a along the X direction, impacts thereaction (normal) force N on the substrate S in a way that once added tothe weight of the substrate W yields a resultant wafer force F2. It ispossible to relate the angle e and the acceleration a in such a way thatthe substrate S substantially does not slip relative to the end effector1520 of the substrate handler 1500. To substantially prevent waferslippage, two situations can be considered for the sake of clarity.First, it is assumed that there is no friction between the substrate andthe end effector 1520. FIG. 24 illustrates a free body diagram of thesubstrate S on the end effector 1520 in the absence of friction μ. Ascan be seen in FIG. 24, despite the absence of friction μ, anacceleration a can be determined in terms of the pitch angle e such thatthe substrate mass m is traveling along the X direction. This relationis expressed by equation (4) below:

a=g tan e  [4]

where g is the acceleration of gravity (9.8 m/s²). FIG. 24A illustrateswafer slippage regions in terms of the pitch angle e. It is noted thatthe substrate S will slip relative to the end effector 1520 withoutfriction p if the pitch angle e is substantially zero. The curveillustrated in FIG. 24A represents the desired pitch angle “e” to keepthe substrate S moving at an acceleration “a” along the X directionwithout slippage. Alternatively, the same curve of FIG. 24A can beinterpreted as the demanded acceleration “a” of the substrate handler1500 to prevent the substrate S from slipping while moving along the Xdirection with the pitch angle “e”. Deviation from the curve illustratedin FIG. 24A will cause the substrate S to slide either “downhill” or“uphill” (where the terms downhill and uphill are used for conveniencerelative to the pitch) relative to the end effector 1520 depending onthe acceleration value.

FIGS. 25A and 25B show the effect of a non-zero static frictioncoefficient μ on the relation between acceleration a and pitch angle e.For example, FIG. 25A illustrates a minimum propulsion accelerationbefore slippage of the substrate S relative to the end effector 1520takes place. In this case, the friction force direction points “uphill”to substantially prevent the wafer mass m from sliding “downhill” (againrelative to the direction of pitch). Here, the “slowest” expectedacceleration to prevent wafer slippage is calculated as:

a _(min)=[−μ+tan e]/[l+μ tan e]  [5]

FIG. 25B, illustrates the case for the maximum (e.g., fastest) expectedpropulsion acceleration a before slippage of the substrate S relative tothe end effector 1520. In this case, the friction force direction points“downhill” to substantially prevent the wafer mass m from sliding“uphill” (again relative to the direction of pitch). Here, the “fastest”expected acceleration a is calculated as:

a _(max)=[μ+tan e]/[1−μ tan e]  [6]

Consequently, in the presence of a non-zero static friction coefficientμ the propulsion acceleration a should stay within the limits below inorder to prevent substrate S slippage, for a given pitch angle:

a _(min) <a<a _(max)  [7]

FIG. 26 provides an example of the dependency between acceleration a andpitch angle e for a static coefficient of p that is about 0.1, which isa typical value for substrate handlers used in high temperatureapplications. The curve of FIG. 24A is repeated in FIG. 26 under thecase of p equal to about 0. The region between the top and bottom curves(p equal to about 0.1) represents a non-slippage region (e.g., a regionof acceleration for a given pitch angle where the substrate slippagerelative to the end effector substantially does not occur). The areasoutside this region may have wafer slippage either in the upwards ofdownwards direction relative to the substrate handler inclination (i.e.,pitch angle e). In the example of FIG. 26, the maximum acceleration witha substantially zero pitch angle is about 0.1 g which is the fastestacceleration that conventional substrate handlers can provide fortypical high temperature applications. If the pitch angle e is set toabout 16 degrees of inclination, the substrate can be transported ataccelerations as high as 0.4 g using the same end effector material (asin conventional substrate handlers) which constitutes a substantialthroughput improvement compared to the conventional substrate handlers.The pitch angle e can be set according to a predetermined accelerationin order to maximize throughput such as depicted in FIG. 21.

FIG. 27 illustrates active control of the substrate handler 1500orientation in roll, pitch, and yaw with respect to leveling of thesubstrate handler 1500 relative to a substrate station, such as processmodule 120. Mechanical deflection imposes challenges on entering andexiting process module openings 2780 which are becoming increasinglysmaller in height H3 due to the need of optimizing process module 120process times. Conventional substrate transports generally suffer fromthe inherent potential of mechanical deflection due to the presence ofarticulated links with bearings that add weight and decrease stiffness,noting that compensating for the end-effector orientation as the wafergoes through the process module opening 2780 may not be practical. Inthese cases, it is becoming increasingly difficult to be able to complywith more restrictive mechanical deflection constraints. The aspects ofthe disclosed embodiment provide a solution to mechanical deflectionthat dynamically compensates for any mechanical deflection bycontrolling the substrate handler orientation in space, relative to thelevel reference plane (e.g., by adjusting the roll, pitch and yaw anglesas described herein) such that a substrate passes through the processmodule opening 2780 substantially without contact between the substrateS and the opening 2780 and substantially without contact between the endeffector 1520 and the opening 2780.

FIGS. 15A-16C illustrate the controlled adjustment, by the local drivecontroller(s) 1750A-1750 n and the local sensor controller(s) 1850A-1850n, of the roll and yaw angles of the substrate handler 1500 in additionto the pitch angle. Referring also to FIG. 27, the controlled adjustmentof each of the roll, yaw, and pitch angles (e.g., by differentiallyvarying at least the lift force vectors acting on the base 1510 asdescribed herein) effects leveling a position of the substrate handler1500 at any suitable substrate holding station such as a process module120 so that a plane 2770 of the substrate S (and end effector 1520 onwhich the substrate S is supported) is substantially the same as a plane2771 defined by the substrate holding station 120 substrate supportsurface 2760. In some aspects, the roll, yaw, and pitch angles areadjusted independent of each other. The controlled adjustment of thesubstrate handler 1500 orientation angles (e.g., roll, pitch, and yaw)also provides for compensation of mechanical deflection of the endeffector 1520 due to, for example, the substrate loading as well as theweight of the substrate handler 1500 structure.

Referring to FIGS. 8-11 and 28 and 29, as described above, in someaspects multiple drive lines 177, 178 are provided so as to extendlongitudinally along a length of the transport chamber 118 to providepassage of one substrate handler 1500 by another substrate handler alongthe longitudinal direction of the transport chamber 118. FIG. 28illustrates passage of two substrate handlers 1500A, 1500B past oneanother with substrate handler 1500A traveling along an inbound track1550A and with substrate handler 1500B travelling along an outboundtrack 1550B. Here each of the substrate handlers 1500A, 1500B have roll,pith, and yaw angles so that the plane 2770 of the end effector 1520(and substrate s held thereon) is substantially parallel (i.e., level)with the level reference plane 1299. Here, with the end effectors 1520level, the transport chamber 118 has a lateral width W1. However, inaccordance with aspects of the disclosed embodiment, the width of thetransport chamber 118 may be minimized or otherwise reduced from lateralwidth W1 to lateral width W2 by adjusting one or more of the roll, thepitch, and the yaw of the substrate handlers 1500A, 1500B as they passone another along the length of the transport chamber 118. For example,as illustrated in FIG. 29 the roll angle of each substrate handler1500A, 1500B may be adjusted to a predetermined angle R relative to thelevel reference plane 1299 to avoid contact between the substratehandlers 1500A, 1500B as they move past one another during a period oftime that both substrate handlers 1500A, 1500B would otherwise occupythe same space. The predetermined roll angle S may depend on endeffector configuration (e.g., so that the substrate S does not sliprelative to the end effector). As may be realized it advantageous tohave control of the roll, pitch, and/or yaw angles of each substratehandler 1500 in order to reduce a footprint of the transport chamber 118that houses the wafer handling automation, where the reduced footprintat least increases tool density on the fabrication facility floor anddecreases pump down times of the transport chamber which may result inincreased throughput.

Referring now to FIGS. 17 and 30, an exemplary control of the array ofelectromagnets 1700 will be described where dynamic phase allocation isemployed. As described herein, the controller 199 (which in one aspectis a clustered or master controller as described herein—see FIG. 39) isoperably coupled to the array of electromagnets 1700 and the alternatingcurrent power source 1585 (the power source may be any suitable type andcan be direct current in which case the controller driving circuit willmodulate that to desired frequency/phase for as many alternating currentpower phases as desired) and configured so as to sequentially excite theelectromagnets 1700A-1700 n with multiphase alternating current so thatthe base 1510 of a substrate handler 1500 is levitated and propelledwith at least one of attitude control and yaw control with a common setof the electromagnets 1700A-1700 n (such as those electromagnets of arespective drive line 177-180). As noted above, the controller 199 isconfigured to sequentially excite the electromagnets 1700A-1700 ncooperating in multi-phase alternating current excitation that formmotor actuator units 1701 corresponding to the position of the base 1510sensed by the sensor 2000. The number n (an integer in the example ofthree or more, though in other aspects may be two or more) ofelectromagnets 1700A-1700 n of each motor actuator unit 1701 as well asthe location (static) of the respective n electromagnets 1700A-1700 n ofeach motor actuator unit 1701 are dynamically selectable by thecontroller 199 in effecting lift and propulsion of the base (secondary)1510 at any given time throughout operation of the motor actuator. Eachof the electromagnets 1700A-1700 n generates, from excitation withcommon multiphase alternating current having a single common frequencyper phase, both the separately controllable levitation and thepropulsion forces against the base 1510 so as to control the base 1510with up to six independent degrees of freedom including at least one ofattitude and yaw at least with the base 1510 levitated. The commonsingle frequency per phase of each phase (here respective phases A, B,C) may be selectably variable from different desired excitationfrequencies so that levitation and propulsion forces generated by themotor actuation unit 1701 enable substantially independent control ofthe base 1510 in each of the up to six independent degrees of freedom.In one aspect, the controller 199 controls the roll, pitch, and yawangles generated by the array of electromagnets 1700A-1700 n arranged inthe respective motor actuator units 1701, including at least theattitude with the base 1510 levitated and propelled so as to moverelative to the array of electromagnets 1700 along the at least onedrive line 177-180 from a first predetermined position P1 (see FIG. 1B)with respect to the frame of the chamber 118 to a second differentpredetermined position P2 (see FIG. 1B) with respect to the frame of thechamber 118. In one aspect, the controller 199 controls the roll, pitch,and yaw angles generated by the array of electromagnets 1700, includingat least the base 1510 attitude and the base 1510 yaw with the base 1510levitated and stationary relative to the array of electromagnets 1700 ina predetermined position (such as position P2 in FIG. 1B) along the atleast one drive line 177-180 with respect to the frame of the chamber118.

FIGS. 32A and 32B illustrate an example where each electromagnet (orcoil unit) 1700A-1700 n grouped so as to define a motor actuator unit1701 having a dynamically selected number of electromagnets, for examplethree electromagnets (n=3) and three corresponding phases (m=3) with anelectrical angle between the phases of 120° (see also FIG. 17) is alsodynamically associated with the three different phases A, B, C so thatassociation of each phase A, B, C with the corresponding staticelectromagnet 1700A-1700 n comports with the dynamic state of the motoractuation unit 1701. Accordingly, with the electromagnets of the motoractuator unit 1701 propelling the base 1510 (e.g., along direction 3100)each phase A, B, C respectively changes or moves from one staticelectromagnet to another (i.e., rolling the designation or allocation ofthe respective phases to consecutive electromagnets 1700A-1700 n so asto generate a virtual (motion)_multi-phase actuator unit 3000, 3000 tP₁,3000 tP₂ of each of the linear electrical machine 1599 and theelectrical machine 1599R proceeding in the direction of motion 3100commensurate with motion of the base 1510 generated by the excitation ofthe electromagnets 1700A-1700 n corresponding to the virtual motionmulti-phase actuation unit 3000, 3000 tP₁, 3000 tP₂. This dynamicrelationship or association producing the virtual motion multi-phaseactuator unit 3000, 3000 tP₁, 3000 tP₂ between coil units and phase willbe referred to here for convenience as “dynamic phase allocation”wherein the virtual motion of the representative virtual motionmulti-phase actuator unit 3000, 3000 tP₁, 3000 tP₂ effecting propulsionof the base 1510 is illustrated schematically in FIG. 30 (see also FIG.17). Here the virtual motion multi-phase actuator unit (or “MAU” in FIG.17) 3000 has dynamically selected three electromagnets and associatedphases A, B, C, shown in an initial (representative) position P=0 attime t=t0. The respective excitation of the virtual motion multi-phaseactuator unit 3000 electromagnets generate propulsion forces that movethe platen/base 1510 between t1 and t2 (see also FIGS. 32A-32B). Here,as shown, at P=0 and t=t0, electromagnets 1700A-1700C are grouped toform virtual motion multi-phase actuator unit 3000, and are respectivelyassociated with phases A, B, C. Coincident with generation of propulsionforces Fx, respective excitation of virtual motion multi-phase actuatorunit 3000 electromagnets 1700A-1700C generate separately controllablelift forces Fy with a controlled variable height relative to theplaten/base 1510, that simultaneously lifts and effect tilt adjustmentof the platen/base 1510 simultaneously with propulsion (see FIGS.32A-32B). As may be realized, under effect of the lift Fy and propulsionFx forces imparted by the respective electromagnets 1700A-1700C of thevirtual motion multi-phase actuator unit 3000 at time t=t0 and positionP=0 the platen/base 1510 moves (relative to the transfer chamber andhence the static electromagnets 1700A-1700C) with a predetermined liftand tilt. To maintain steady state tilt of the platen/base 1510 duringmotion away from the group of electromagnets 1700A-1700C (definingvirtual motion multi-phase actuator unit 3000 at P=0 and T=T0) thecontroller 199 and circuitry 3050, of the respective electromagnets ofthe electromagnet array 1700A-1700 n, are configured to dynamically“move” (or “change”) the allocation of the respective phases A, B, C(from the initial virtual motion multi-phase actuator unit 3000 at P=0and t=t0) commensurate with the travel of the platen/base 1510 at timet=t1 and position P=1 to corresponding electromagnets 1700B-1700D thatnow define virtual motion multi-phase actuator unit 3000 tP1 disposed atposition P=1 at time t=t1, and subsequently allocation of the respectivephases A, B, C (from the virtual motion multi-phase actuator unit 3000tP1 at P=1 and t=t1) commensurate with the travel of the platen/base1510 at time t=t2 and position P=2 to corresponding electromagnets1700C-1700E that now define virtual motion multi-phase actuator unit3000 tP2 disposed at position P=2 at time t=t2, and so on. Dynamic phaseallocation is repeated throughout platen/base 1510 motion so that thephase distribution with respect to the platen, and excitation byrespective phases (here A, B, C) of the platen/base 1510 remainsubstantially steady state throughout motion of the platen/base 1510.

The virtual multi-phase actuator unit 3000, 3000 tP₁, 3000 tP₂ maycomprise a series of electromagnets 1700A-1700 n of the array ofelectromagnets 1700 coupled to at least the multiphase alternatingcurrent power source 1585 that define at least one drive line 177-180within the drive plane 1598, where electromagnets 1700A-1700 n in theseries of electromagnets 1700A-1700 n are dynamically grouped into atleast one multiphase actuator unit DLIM1, DLIM2, DLIM3, and each of theat least one multiphase actuator unit DLIM1, DLIM2, DLIM3 being coupledto at least the multiphase alternating current power source 1585. Inthis case, on initiating propulsion (effecting motion of thebase/secondary) by excitation of corresponding electromagnet groups ofthe motor actuation unit at an initial position (P=0, t=0) thedefinition of phases A, B, C and the associated “motors” (e.g., DLIM1,DLIM2, DLIM3) are changing in space and time (Pi, ti), as describedabove, in order to maintain substantially steady state force vectorsFZ1, FZ2, FX1, FX2 imparted on the base 1510 throughout the range ofmotion, that provide a desired substantially steady state or constanttilt orientation of the substrate handler 1500 throughout the range ofmotion. As noted herein, an exemplary actuator control system network1799 configured to effect dynamic phase allocation is described withrespect to FIG. 17. As can be seen in FIGS. 32A and 32B, the dynamicphase allocation is controlled by the controller 199 so that therespective electromagnets 1700A-1700 n grouped into corresponding motoractuation units (such as described herein) energized by the multiphasealternating current A, B, C present, with respect to the base 1510(represented by the front portion 3110 and rear portion 3111), asubstantially steady state multiphase distribution across respectiveelectromagnets 1700A-1700 n of the virtually moving at least onemultiphase actuator unit DLIM1, DLIM2, DLIM3. It is noted that the phasecurrents A, B, C are illustrated within respective electromagnets1700A-1700 n and the phase current distribution across the at least onemultiphase actuator unit DLIM1, DLIM2, DLIM3 remains constant or steadystate with respect to the base 1510 (e.g., as an example of steady statenote phase current A remains at the trailing end of the rear portion3111, phase current C remains at the leading end of the rear portion3111, and phase current B remains in the center of the rear portion 3111throughout movement of the base 1510 and the at least one (virtuallymoving) multiphase actuator unit DLIM1, DLIM2, DLIM3 in the direction3100).

In greater detail of dynamic phase allocation, FIG. 30 depicts at timet1 electromagnets 1700A, 1700B, 1700C which are respectively defined asphases A, B, C (FIGS. 30 and 32A) which generate a spatial forcevector(s) that provides separately controllable lift and propulsionforces of a predetermined substrate handler 1500 (i.e., a wafer handleridentified by the sensors 2000 and selected for movement by thecontroller 199). As the substrate handler 1500 moves in space (e.g.,along the drive line associated with the array of electromagnets 1700),at time t2 electromagnets 1700B, 1700C, 1700D respectively become phasesA, B, C (FIGS. 30 and 32B). As the substrate handler 1500 continues totravel along the drive line (which in this example is in direction 3100as shown in FIGS. 32A, 32B, and 32C), at time t3 phases A, B, C areassociated with electromagnets 1700C, 1700D, 1700E, respectively. Thisdynamic phase allocation effects continuous spatial and time control ofthe force vectors that maintain propulsion, lift, and orientation of thepredetermined substrate handler 1500. In one aspect, the alternatingcurrent power source 1585 is coupled to each of the electromagnets1700A-1700 n of the array of electromagnets 1700 through any suitablesignal conditioning circuitry 3050 which may include currentamplification power supply units 3011 or any other suitable signalprocessing. The phase A, B, C currents are transmitted to each of thelocal drive controllers 1750A-1750 n which, under control of or inresponse to instruction from, master controller 1760 provide a specifiedone of the phase A, B, C currents to the respective electromagnets inthe manner noted above to effect dynamic phase allocation.

As described herein, the base 1510 (FIG. 16B) of a substrate handlercooperates with the electromagnets 1700A-1700 n of the at least onemultiphase actuator unit (FIG. 32B) DLIM, DLIM2, DLIM3 so thatexcitation of the electromagnets 1700A-1700 n with alternating currentgenerates levitation and propulsion forces against the base 1510 thatcontrollably levitate and propel the base 1510 along the at least onedrive line 177-180, in a controlled attitude relative to the drive plane1598. The controller 199 (which in some aspects includes at least themaster controller 1760 and any controller subordinate to the mastercontroller such as the local drive controllers 1750A-1750 n; however inother aspects the controller may have any suitable configuration), isoperable coupled to the alternating current power source 1585 and thearray of electromagnets 1700. The alternating current power source 1585may include any suitable associated circuitry 3050 through which thealternating current power source 1585 is connected to the array ofelectromagnets 1700. The alternating current power source 1585 iscontrolled by the local drive controllers or any other suitablecontroller such as the master controller 1760. Typical controlparameters for the alternating current power source comprise of signalamplitude, signal frequency, and phase shift relative to a referencecoil unit. Other types of control parameters may be defined. As usedherein the “phase” A, B, C as illustrated in FIG. 30 is similar to aparticular coil in a multi-phase electrical motor; however, the each ofthe phase definitions (such as A, B, C in FIG. 30) is not physicallytied to any particular coil.

As a comparison with prior art, if segmented linear induction motorswith static phase allocation were to be used with their own dedicatedcontrols, then it would be difficult to effect angle/tilt controls whenthe substrate handler transitions from one segment to the next. FIGS.31A and 31B, illustrate this problem of maintaining pitch controlsacross static segmented linear induction motors. FIG. 31A shows thefront portion 3110 and rear portion 3111 of a base 1510 or secondarywith induced forces along the Z and X axes. The first motor segment(SLIMl) with phases A, B and C generate the forces Fzl and Fxl to liftand propel the rear portion 3111 of the base. The second motor segment(SLIM2) generates forces Fz2 and Fx2 for the front portion 3110 of thebase using its respective phases A, B and C. As the base moves indirection 3100, the front and rear portions 3110, 3111 of the base willtransition into the next linear induction motor segments. This is shownin FIG. 31B. At this position, the rear portion 3111 of the baseoverlaps with phases B and C of SLIMI and phase A of SLIM2. At the sametime, the front portion 3110 of the base overlaps with phases B and C ofSLIM2 and phase A for SLIM3. As a result, it is not possible to maintainthe same required forces Fzl, Fxl, Fz2, Fx2 since for instance SLIM2phases are being shared by both front and rear portions 3110, 3111 ofthe base.

As described before, and now referring to FIG. 32C in one aspect,controlling propulsion and levitation simultaneously and separately (sothat propulsion forces and lift forces are separately controllable infull, so that control of each may be deemed independent of one anotherthough both forces are effected by excitation with common multiphasealternating current having a single common frequency per phase, thecommon frequency per phase is selectably variable from different desiredfrequencies) may be effected by a variant of the dynamic phaseallocation described herein, where one or more dynamic linear motor(DLIM) may include a selectable n number of phases associated withelectromagnets defining the virtual motion multi-phase actuator unit,where n can be an integer larger than three. The number n ofelectromagnets defining the virtual motion multi-phase actuator unit maybe dynamically selected, for example, for effecting different moves ofthe platen/base 1510 depending on kinematic characteristics of thedesired move. Here the excitation frequency commonly applied per phaseof the virtual motion multi-phase actuator unit is selected by thecontroller 199 so as to generate desired kinematic performance andcontrol of the platen/base 1510. Here, the phase control algorithmmaintains the same electrical phase angle difference between the phases(e.g., electromagnets of the motor), as shown in FIG. 32C. Theelectrical phase difference is calculated relative to a reference phaseor relative to each phase. The electrical phase angle difference φbetween phases may range from about −180 degrees to about 180 degrees,where a value of about 0 degrees corresponds to no propulsion force,while positive and negative values provide for propulsion forces inpositive and negative direction, respectively. Depending on the value ofthe electrical phase angle difference φ the number of electromagnetswithin a respective dynamic linear motor varies. Here, the boundarybetween DLIM1 (illustrated for exemplary purposes with 6 electromagnets)and DLIM2 as shown in FIG. 32C is dynamic. In another aspect of thedynamic linear motor electromagnet/phase allocation, not allelectromagnets of a dynamic linear motor need to be energized at thesame time. Referring to DLIM 1, only m (in this example m=4)electromagnets out of all n (in this example n=6) electromagnets ofdynamic linear motor DLIM1 (where m is the number of electromagnetscovered by the base (or secondary)) are energized to effect lift andpropulsion of the base 1510, while the other electromagnets of the nelectromagnets of the dynamic linear motor DLIMl can be turned off.

Referring now to, for example, FIGS. 1A-11, 15A-15C, 17, 28, 29, 30, and41, an exemplary method for a linear electrical machine 1599 will bedescribed in accordance with one or more aspects of the disclosedembodiment. In the method the linear electrical machine 1599 is providedwith a frame (FIG. 41, Block 4100), where the frame has a levelreference plane 1299. A drive plane 1598 is formed (FIG. 41, Block 4110)with an array of electromagnets 1700 connected to the frame. The driveplane 1598 is located at a predetermined height H relative to the levelreference plane 1299. The array of electromagnets 1700 being arranged sothat a series of electromagnets of the array of electromagnets define atleast one drive line 177, 178 within the drive plane 1598, and each ofthe electromagnets 1700A-1700 n (see FIG. 15B) being coupled to analternating current (AC) power source 1585 energizing each electromagnet1700A-1700 n. At least one reaction platen 1510 is provided (FIG. 41,Block 4120) where the at least one reaction platen 1510 is ofparamagnetic, diamagnetic, or non-magnetic conductive material disposedto cooperate with the electromagnets 1700A-1700 n of the array ofelectromagnets 1700. The electromagnets 1700A-1700 n are excited withalternating current to generate levitation and propulsion forces FZ, FP(FIG. 41, Block 4130) against the reaction platen 1510 that controllablylevitate and propel the reaction platen 1510 along the at least onedrive line, in a controlled attitude relative to the drive plane 1598.In the method for the linear electric machine 1599 the electromagnets1700A-1700 n are sequentially excited, with a controller 199 operablycoupled to the array of electromagnets 1700 and the alternating currentpower source 1585, with multiphase alternating current so that eachreaction platen 1510 is levitated and propelled with up to six degreesof freedom including at least one of attitude control and yaw controlwith a common set of the electromagnets 1700A-1700 n, each of whichgenerates, from excitation with common multiphase alternating currenthaving a single common frequency per phase, both the levitation and thepropulsion forces FZ, FP against the reaction platen 1510 so as tocontrol the reaction platen 1510 with up to six degrees of freedomincluding at least one of reaction platen attitude and reaction platenyaw at least with the reaction platen 1510 levitated.

Referring now to, for example, FIGS. 1A-11, 15A-15C, 17, 28, 29, 30, and42, a method for an electromagnetic conveyor substrate transportapparatus 1599 will be described in accordance with one or more aspectsof the disclosed embodiment. In the method the electromagnetic conveyorsubstrate transport apparatus 1599 is provided with a chamber 118 (FIG.42, Block 4200) configured to hold a sealed atmosphere therein, andhaving a level reference plane 1299 and at least one substrate passthrough opening 118O for transferring a substrate in and out of thechamber 118 through the opening 118O. A drive plane 1598 is formed (FIG.42, Block 4210) with an array of electromagnets 1700 connected to thechamber 118. The drive plane 1598 is located at a predetermined height Hrelative to the level reference plane 1299. The array of electromagnets1700 being arranged so that a series of electromagnets 1700A-1700 n ofthe array of electromagnets 1700 define at least one drive line 177, 178within the drive plane 1598, electromagnets 1700A-1700 n in the seriesof electromagnets 1700A-1700 n being grouped into at least onemultiphase actuator unit, and each of the at least one multiphaseactuator unit being coupled to a multiphase alternating current (AC)power source 1585. At least one reaction platen 1510 is provided (FIG.42, Block 4220) where the at least one reaction platen 1510 is ofparamagnetic, diamagnetic, or non-magnetic conductive material disposedto cooperate with the electromagnets 1700A-1700 n of the at least onemultiphase actuator unit. The electromagnets 1700A-1700 n are excitedwith alternating current to generate levitation and propulsion forcesFZ, FP (FIG. 42, Block 4230) against the reaction platen 1510 thatcontrollably levitate and propel the reaction platen 1510 along the atleast one drive line 177, 178, in a controlled attitude relative to thedrive plane 1598. The electromagnets 1700A-1700 n are sequentiallyexcited, with a controller 199 operably coupled to the array ofelectromagnets 1700 and alternating current power source 1585, withmultiphase alternating current so that a reaction platen 1510 islevitated and propelled, wherein each alternating current phase, of themultiphase alternating current, is dynamically allocated betweenrespective electromagnets 1700A-1700 n so that the alternating currentphase of each respective electromagnet 1700A-1700 n, of theelectromagnet group of the at least one multiphase actuator unit,changes from a first alternating current phase to a second differentalternating current phase so in effect the electromagnet group movesvirtually and the at least one multiphase actuator unit formed by theelectromagnet group moves virtually via dynamic phase allocation alongthe drive line 177, 178.

In accordance with one or more aspects of the disclosed embodiment alinear electrical machine comprises:

a frame with a level reference plane;

an array of electromagnets, connected to the frame to form a drive planeat a predetermined height relative to the level reference plane, thearray of electromagnets being arranged so that a series ofelectromagnets of the array of electromagnets define at least one driveline within the drive plane, and each of the electromagnets beingcoupled to an alternating current power source energizing eachelectromagnet;

at least one reaction platen of paramagnetic, diamagnetic, ornon-magnetic conductive material disposed to cooperate with theelectromagnets of the array of electromagnets so that excitation of theelectromagnets with alternating current generates levitation andpropulsion forces against the reaction platen that controllably levitateand propel the reaction platen along the at least one drive line, in acontrolled attitude relative to the drive plane; and

a controller operably coupled to the array of electromagnets and thealternating current power source and configured so as to sequentiallyexcite the electromagnets with multiphase alternating current so thateach reaction platen is levitated and propelled with up to six degreesof freedom including at least one of attitude control and yaw controlwith a common set of the electromagnets, each of which generates, fromexcitation with common multiphase alternating current having a singlecommon frequency per phase, both the levitation and the propulsionforces against the reaction platen so as to control the reaction platenwith up to six degrees of freedom including at least one of reactionplaten attitude and reaction platen yaw at least with the reactionplaten levitated.

In accordance with one or more aspects of the disclosed embodiment thecontroller controls the up to six degrees of freedom, generated by thearray of electromagnets, including at least the reaction platen attitudewith the reaction platen levitated and propelled so as to move relativeto the array of electromagnets along the at least one drive line from afirst predetermined position with respect to the frame to a seconddifferent predetermined position with respect to the frame.

In accordance with one or more aspects of the disclosed embodiment thecontroller controls the up to six degrees of freedom, generated by thearray of electromagnets, including at least the reaction platen attitudeand the reaction platen yaw with the reaction platen levitated andstationary relative to the array of electromagnets in a predeterminedposition along the at least one drive line with respect to the frame.

In accordance with one or more aspects of the disclosed embodiment thecontroller controls the propulsion forces, generated by the array ofelectromagnets, across the reaction platen so as to impart a controlledyaw moment on the reaction platen, yawing the reaction platen about ayaw axis, substantially normal to the drive plane, from a firstpredetermined orientation relative to the frame, to a second differentpredetermined orientation relative to the frame.

In accordance with one or more aspects of the disclosed embodiment thecontroller controls the propulsion forces, generated by the array ofelectromagnets, so as to impart a moment couple on the reaction plateneffecting controlled yaw of the reaction platen so as to effect at leastone of positioning and centering of a wafer payload on the reactionplaten relative to a predetermined wafer holding location of the frame.

In accordance with one or more aspects of the disclosed embodiment thecontroller controls the levitation forces, generated by the array ofelectromagnets, so as to impart differential levitation forces acrossthe reaction platen that effect a controlled inclination of the reactionplaten, relative to the drive plane, that controls a predeterminedreaction platen attitude in at least one of reaction platen pitch andreaction platen roll.

In accordance with one or more aspects of the disclosed embodiment thecontroller controls the levitation forces, generated by the array ofelectromagnets, so as to effect a predetermined bias attitude of thereaction platen, relative to the drive plane, that imparts a biasreaction force, from a reaction platen payload seating surface on apayload supported by the reaction platen seating surface, in a directioncountering payload inertial force arising from acceleration of thereaction platen along the drive plane.

In accordance with one or more aspects of the disclosed embodiment thelinear electrical machine further comprises position feedback sensorsdistributed on the frame configured for sensing position of the reactionplaten along the drive plane and communicably coupled to the controllerso the controller registers the sensed position of the reaction platen,wherein the controller is configured to sequentially excite theelectromagnets of the array of electromagnets corresponding to thesensed position.

In accordance with one or more aspects of the disclosed embodiment thecontroller is configured to determine acceleration of the reactionplaten along the drive plane at least from changes in the sensedposition, and in response to the acceleration determined, control a biasattitude of the reaction platen to provide the predetermined biasattitude countering the payload inertial force arising from theacceleration of the reaction platen.

In accordance with one or more aspects of the disclosed embodiment thecontroller controls excitation of the electromagnets of the array ofelectromagnets so as to set the reaction platen attitude to bias thereaction platen against inertial forces tending to displace a payload,seated against the reaction platen, relative to the reaction platenalong a seat between the payload and the reaction platen.

In accordance with one or more aspects of the disclosed embodiment anelectromagnetic conveyor substrate transport apparatus comprises:

a chamber configured to hold a sealed atmosphere therein, and having alevel reference plane and at least one substrate pass through openingfor transferring a substrate in and out of the chamber through theopening;

an array of electromagnets, connected to the chamber to form a driveplane at a predetermined height relative to the level reference plane,the array of electromagnets being arranged so that a series ofelectromagnets of the array of electromagnets define at least one driveline within the drive plane, electromagnets in the series ofelectromagnets being grouped into at least one multiphase actuator unit,and each of the at least one multiphase actuator unit being coupled to amultiphase alternating current power source;

at least one reaction platen of paramagnetic, diamagnetic, ornon-magnetic conductive material disposed to cooperate with theelectromagnets of the at least one multiphase actuator unit so thatexcitation of the electromagnets with alternating current generateslevitation and propulsion forces against the reaction platen thatcontrollably levitate and propel the reaction platen along the at leastone drive line, in a controlled attitude relative to the drive plane;and

a controller operably coupled to the array of electromagnets andalternating current power source and configured so as to sequentiallyexcite the electromagnets with multiphase alternating current so that areaction platen is levitated and propelled, wherein each alternatingcurrent phase, of the multiphase alternating current, is dynamicallyallocated between respective electromagnets so that the alternatingcurrent phase of each respective electromagnet, of the electromagnetgroup of the at least one multiphase actuator unit, changes from a firstalternating current phase to a second different alternating currentphase so in effect the electromagnet group moves virtually and the atleast one multiphase actuator unit formed by the electromagnet groupmoves virtually via dynamic phase allocation along the drive line.

In accordance with one or more aspects of the disclosed embodiment thereaction platen is levitated and propelled with up to six degrees offreedom including at least one of attitude and yaw control with thevirtually moving at least one multiphase actuator unit.

In accordance with one or more aspects of the disclosed embodiment thecontroller controls the up to six degrees of freedom, generated by thearray of electromagnets, including at least the reaction platen attitudewith the reaction platen levitated and propelled so as to move relativeto the array of electromagnets along the at least one drive line from afirst predetermined position with respect to the chamber to a seconddifferent predetermined position with respect to the chamber.

In accordance with one or more aspects of the disclosed embodiment thecontroller controls the up to six degrees of freedom, generated by thearray of electromagnets, including at least the reaction platen attitudeand the reaction platen yaw with the reaction platen levitated andstationary relative to the array of electromagnets in a predeterminedposition along the at least one drive line with respect to the chamber.

In accordance with one or more aspects of the disclosed embodiment thedynamic phase allocation is controlled so that the virtually moving atleast one multiphase actuator unit moves virtually along the drive linesubstantially coincident with reaction platen movement along the driveline from propulsion by the virtually moving at least one multiphaseactuator unit.

In accordance with one or more aspects of the disclosed embodiment thecontroller controls the propulsion forces, generated by the array ofelectromagnets, across the reaction platen so as to impart a controlledyaw moment on the reaction platen, yawing the reaction platen about ayaw axis, substantially normal to the drive plane, from a firstpredetermined orientation relative to the chamber, to a second differentpredetermined orientation relative to the chamber.

In accordance with one or more aspects of the disclosed embodiment thecontroller controls the propulsion forces, generated by the array ofelectromagnets, so as to impart a moment couple on the reaction plateneffecting controlled yaw of the reaction platen so as to effect at leastone of positioning and centering of a wafer payload on the reactionplaten relative to a predetermined wafer holding location of thechamber.

In accordance with one or more aspects of the disclosed embodiment thecontroller controls the levitation forces, generated by the array ofelectromagnets, so as to impart differential levitation forces acrossthe reaction platen that effect a controlled inclination of the reactionplaten, relative to the drive plane, that controls a predeterminedreaction platen attitude in at least one of reaction platen pitch andreaction platen roll.

In accordance with one or more aspects of the disclosed embodiment thecontroller controls the levitation forces, generated by the array ofelectromagnets, so as to effect a predetermined bias attitude of thereaction platen, relative to the drive plane, that imparts a biasreaction force, from a reaction platen payload seating surface on apayload supported by the reaction platen seating surface, in a directioncountering payload inertial force arising from acceleration of thereaction platen along the drive plane.

In accordance with one or more aspects of the disclosed embodiment theelectromagnetic conveyor substrate transport apparatus further comprisesposition feedback sensors distributed on the chamber configured forsensing position of the reaction platen along the drive plane andcommunicably coupled to the controller so the controller registers thesensed position of the reaction platen, wherein the controller isconfigured to sequentially excite the electromagnets of the array ofelectromagnets corresponding to the sensed position.

In accordance with one or more aspects of the disclosed embodiment thecontroller is configured to determine acceleration of the reactionplaten along the drive plane at least from changes in the sensedposition, and in response to the acceleration determined, control a biasattitude of the reaction platen to provide the predetermined biasattitude countering the payload inertial force arising from theacceleration of the reaction platen.

In accordance with one or more aspects of the disclosed embodiment thecontroller controls excitation of the electromagnets of the array ofelectromagnets so as to set the reaction platen attitude to bias thereaction platen against inertial forces tending to displace a payload,seated against the reaction platen, relative to the reaction platenalong a seat between the payload and the reaction platen.

In accordance with one or more aspects of the disclosed embodiment thedynamic phase allocation is controlled so that the respectiveelectromagnets energized by the multiphase alternating current present,with respect to the reaction platen, a substantially steady statemultiphase distribution across respective electromagnets of thevirtually moving at least one multiphase actuator unit.

In accordance with one or more aspects of the disclosed embodimentmethod for a linear electrical machine is provided. The methodcomprises:

providing the linear electrical machine with a frame, the frame having alevel reference plane;

forming a drive plane with an array of electromagnets connected to theframe, the drive plane is located at a predetermined height relative tothe level reference plane, the array of electromagnets being arranged sothat a series of electromagnets of the array of electromagnets define atleast one drive line within the drive plane, and each of theelectromagnets being coupled to an alternating current power sourceenergizing each electromagnet;

providing at least one reaction platen of paramagnetic, diamagnetic, ornon-magnetic conductive material disposed to cooperate with theelectromagnets of the array of electromagnets; and

exciting the electromagnets with alternating current to generatelevitation and propulsion forces against the reaction platen thatcontrollably levitate and propel the reaction platen along the at leastone drive line, in a controlled attitude relative to the drive plane;

wherein the electromagnets are sequentially excited, with a controlleroperably coupled to the array of electromagnets and the alternatingcurrent power source, with multiphase alternating current so that eachreaction platen is levitated and propelled with up to six degrees offreedom including at least one of attitude control and yaw control witha common set of the electromagnets, each of which generates, fromexcitation with common multiphase alternating current having a singlecommon frequency per phase, both the levitation and the propulsionforces against the reaction platen so as to control the reaction platenwith up to six degrees of freedom including at least one of reactionplaten attitude and reaction platen yaw at least with the reactionplaten levitated.

In accordance with one or more aspects of the disclosed embodiment thecontroller controls the up to six degrees of freedom, generated by thearray of electromagnets, including at least the reaction platen attitudewith the reaction platen levitated and propelled so as to move relativeto the array of electromagnets along the at least one drive line from afirst predetermined position with respect to the frame to a seconddifferent predetermined position with respect to the frame.

In accordance with one or more aspects of the disclosed embodiment thecontroller controls the up to six degrees of freedom, generated by thearray of electromagnets, including at least the reaction platen attitudeand the reaction platen yaw with the reaction platen levitated andstationary relative to the array of electromagnets in a predeterminedposition along the at least one drive line with respect to the frame.

In accordance with one or more aspects of the disclosed embodiment thecontroller controls the propulsion forces, generated by the array ofelectromagnets, across the reaction platen so as to impart a controlledyaw moment on the reaction platen, yawing the reaction platen about ayaw axis, substantially normal to the drive plane, from a firstpredetermined orientation relative to the frame, to a second differentpredetermined orientation relative to the frame.

In accordance with one or more aspects of the disclosed embodiment thecontroller controls the propulsion forces, generated by the array ofelectromagnets, so as to impart a moment couple on the reaction plateneffecting controlled yaw of the reaction platen so as to effect at leastone of positioning and centering of a wafer payload on the reactionplaten relative to a predetermined wafer holding location of the frame.

In accordance with one or more aspects of the disclosed embodiment thecontroller controls the levitation forces, generated by the array ofelectromagnets, so as to impart differential levitation forces acrossthe reaction platen that effect a controlled inclination of the reactionplaten, relative to the drive plane, that controls a predeterminedreaction platen attitude in at least one of reaction platen pitch andreaction platen roll.

In accordance with one or more aspects of the disclosed embodiment thecontroller controls the levitation forces, generated by the array ofelectromagnets, so as to effect a predetermined bias attitude of thereaction platen, relative to the drive plane, that imparts a biasreaction force, from a reaction platen payload seating surface on apayload supported by the reaction platen seating surface, in a directioncountering payload inertial force arising from acceleration of thereaction platen along the drive plane.

In accordance with one or more aspects of the disclosed embodimentmethod further comprises sensing, with position feedback sensorsdistributed on the frame, position of the reaction platen along thedrive plane and communicably coupled to the controller so the controllerregisters the sensed position of the reaction platen, wherein thecontroller sequentially excites the electromagnets of the array ofelectromagnets corresponding to the sensed position.

In accordance with one or more aspects of the disclosed embodiment thecontroller determines acceleration of the reaction platen along thedrive plane at least from changes in the sensed position, and inresponse to the acceleration determined, control a bias attitude of thereaction platen to provide the predetermined bias attitude counteringthe payload inertial force arising from the acceleration of the reactionplaten.

In accordance with one or more aspects of the disclosed embodiment thecontroller controls excitation of the electromagnets of the array ofelectromagnets so as to set the reaction platen attitude to bias thereaction platen against inertial forces tending to displace a payload,seated against the reaction platen, relative to the reaction platenalong a seat between the payload and the reaction platen.

In accordance with one or more aspects of the disclosed embodiment amethod for an electromagnetic conveyor substrate transport apparatus isprovided. The method comprises:

providing the electromagnetic conveyor substrate transport apparatuswith a chamber configured to hold a sealed atmosphere therein, andhaving a level reference plane and at least one substrate pass throughopening for transferring a substrate in and out of the chamber throughthe opening;

forming a drive plane with an array of electromagnets connected to thechamber, the drive plane is located at a predetermined height relativeto the level reference plane, the array of electromagnets being arrangedso that a series of electromagnets of the array of electromagnets defineat least one drive line within the drive plane, electromagnets in theseries of electromagnets being grouped into at least one multiphaseactuator unit, and each of the at least one multiphase actuator unitbeing coupled to a multiphase alternating current power source;

providing at least one reaction platen of paramagnetic, diamagnetic, ornon-magnetic conductive material disposed to cooperate with theelectromagnets of the at least one multiphase actuator unit; and

exciting the electromagnets with alternating current to generatelevitation and propulsion forces against the reaction platen thatcontrollably levitate and propel the reaction platen along the at leastone drive line, in a controlled attitude relative to the drive plane;

wherein the electromagnets are sequentially excited, with a controlleroperably coupled to the array of electromagnets and alternating currentpower source, with multiphase alternating current so that a reactionplaten is levitated and propelled, wherein each alternating currentphase, of the multiphase alternating current, is dynamically allocatedbetween respective electromagnets so that the alternating current phaseof each respective electromagnet, of the electromagnet group of the atleast one multiphase actuator unit, changes from a first alternatingcurrent phase to a second different alternating current phase so ineffect the electromagnet group moves virtually and the at least onemultiphase actuator unit formed by the electromagnet group movesvirtually via dynamic phase allocation along the drive line.

In accordance with one or more aspects of the disclosed embodiment thereaction platen is levitated and propelled with up to six degrees offreedom including at least one of attitude and yaw control with thevirtually moving at least one multiphase actuator unit.

In accordance with one or more aspects of the disclosed embodiment thecontroller controls the up to six degrees of freedom, generated by thearray of electromagnets, including at least the reaction platen attitudewith the reaction platen levitated and propelled so as to move relativeto the array of electromagnets along the at least one drive line from afirst predetermined position with respect to the chamber to a seconddifferent predetermined position with respect to the chamber.

In accordance with one or more aspects of the disclosed embodiment thecontroller controls the up to six degrees of freedom, generated by thearray of electromagnets, including at least the reaction platen attitudeand the reaction platen yaw with the reaction platen levitated andstationary relative to the array of electromagnets in a predeterminedposition along the at least one drive line with respect to the chamber.

In accordance with one or more aspects of the disclosed embodiment thedynamic phase allocation is controlled so that the virtually moving atleast one multiphase actuator unit moves virtually along the drive linesubstantially coincident with reaction platen movement along the driveline from propulsion by the virtually moving at least one multiphaseactuator unit.

In accordance with one or more aspects of the disclosed embodiment thecontroller controls the propulsion forces, generated by the array ofelectromagnets, across the reaction platen so as to impart a controlledyaw moment on the reaction platen, yawing the reaction platen about ayaw axis, substantially normal to the drive plane, from a firstpredetermined orientation relative to the chamber, to a second differentpredetermined orientation relative to the chamber.

In accordance with one or more aspects of the disclosed embodiment thecontroller controls the propulsion forces, generated by the array ofelectromagnets, so as to impart a moment couple on the reaction plateneffecting controlled yaw of the reaction platen so as to effect at leastone of positioning and centering of a wafer payload on the reactionplaten relative to a predetermined wafer holding location of thechamber.

In accordance with one or more aspects of the disclosed embodiment thecontroller controls the levitation forces, generated by the array ofelectromagnets, so as to impart differential levitation forces acrossthe reaction platen that effect a controlled inclination of the reactionplaten, relative to the drive plane, that controls a predeterminedreaction platen attitude in at least one of reaction platen pitch andreaction platen roll.

In accordance with one or more aspects of the disclosed embodiment thecontroller controls the levitation forces, generated by the array ofelectromagnets, so as to effect a predetermined bias attitude of thereaction platen, relative to the drive plane, that imparts a biasreaction force, from a reaction platen payload seating surface on apayload supported by the reaction platen seating surface, in a directioncountering payload inertial force arising from acceleration of thereaction platen along the drive plane.

In accordance with one or more aspects of the disclosed embodiment themethod further comprises sensing, with the position feedback sensorsdistributed on the chamber, position of the reaction platen along thedrive plane and communicably coupled to the controller so the controllerregisters the sensed position of the reaction platen, wherein thecontroller is configured to sequentially excite the electromagnets ofthe array of electromagnets corresponding to the sensed position.

In accordance with one or more aspects of the disclosed embodiment thecontroller determines acceleration of the reaction platen along thedrive plane at least from changes in the sensed position, and inresponse to the acceleration determined, control a bias attitude of thereaction platen to provide the predetermined bias attitude counteringthe payload inertial force arising from the acceleration of the reactionplaten.

In accordance with one or more aspects of the disclosed embodiment thecontroller controls excitation of the electromagnets of the array ofelectromagnets so as to set the reaction platen attitude to bias thereaction platen against inertial forces tending to displace a payload,seated against the reaction platen, relative to the reaction platenalong a seat between the payload and the reaction platen.

In accordance with one or more aspects of the disclosed embodiment thedynamic phase allocation is controlled so that the respectiveelectromagnets energized by the multiphase alternating current present,with respect to the reaction platen, a substantially steady statemultiphase distribution across respective electromagnets of thevirtually moving at least one multiphase actuator unit.

It should be understood that the foregoing description is onlyillustrative of the aspects of the disclosed embodiment. Variousalternatives and modifications can be devised by those skilled in theart without departing from the aspects of the disclosed embodiment.Accordingly, the aspects of the disclosed embodiment are intended toembrace all such alternatives, modifications and variances that fallwithin the scope of any claims appended hereto. Further, the mere factthat different features are recited in mutually different dependent orindependent claims does not indicate that a combination of thesefeatures cannot be advantageously used, such a combination remainingwithin the scope of the aspects of the present disclosure.

What is claimed is:
 1. A linear electrical machine comprising: a frame with a level reference plane; an array of electromagnets, connected to the frame to form a drive plane at a predetermined height relative to the level reference plane, the array of electromagnets being arranged so that a series of electromagnets of the array of electromagnets define at least one drive line within the drive plane, and each of the electromagnets being coupled to an alternating current power source energizing each electromagnet; at least one reaction platen of paramagnetic, diamagnetic, or non-magnetic conductive material disposed to cooperate with the electromagnets of the array of electromagnets so that excitation of the electromagnets with alternating current generates levitation and propulsion forces against the reaction platen that controllably levitate and propel the reaction platen along the at least one drive line, in a controlled attitude relative to the drive plane; and a controller operably coupled to the array of electromagnets and the alternating current power source and configured so as to sequentially excite the electromagnets with multiphase alternating current so that each reaction platen is levitated and propelled with up to six degrees of freedom including at least one of attitude control and yaw control with a common set of the electromagnets, each of which generates, from excitation with common multiphase alternating current having a single common frequency per phase, both the levitation and the propulsion forces against the reaction platen so as to control the reaction platen with up to six degrees of freedom including at least one of reaction platen attitude and reaction platen yaw at least with the reaction platen levitated.
 2. The linear electrical machine of claim 1, wherein the controller controls the up to six degrees of freedom, generated by the array of electromagnets, including at least the reaction platen attitude with the reaction platen levitated and propelled so as to move relative to the array of electromagnets along the at least one drive line from a first predetermined position with respect to the frame to a second different predetermined position with respect to the frame.
 3. The linear electrical machine of claim 1, wherein the controller controls the up to six degrees of freedom, generated by the array of electromagnets, including at least the reaction platen attitude and the reaction platen yaw with the reaction platen levitated and stationary relative to the array of electromagnets in a predetermined position along the at least one drive line with respect to the frame.
 4. The linear electrical machine of claim 1, wherein the controller controls the propulsion forces, generated by the array of electromagnets, across the reaction platen so as to impart a controlled yaw moment on the reaction platen, yawing the reaction platen about a yaw axis, substantially normal to the drive plane, from a first predetermined orientation relative to the frame, to a second different predetermined orientation relative to the frame.
 5. The linear electrical machine of claim 1, wherein the controller controls the propulsion forces, generated by the array of electromagnets, so as to impart a moment couple on the reaction platen effecting controlled yaw of the reaction platen so as to effect at least one of positioning and centering of a wafer payload on the reaction platen relative to a predetermined wafer holding location of the frame.
 6. The linear electrical machine of claim 1, wherein the controller controls the levitation forces, generated by the array of electromagnets, so as to impart differential levitation forces across the reaction platen that effect a controlled inclination of the reaction platen, relative to the drive plane, that controls a predetermined reaction platen attitude in at least one of reaction platen pitch and reaction platen roll.
 7. The linear electrical machine of claim 1, wherein the controller controls the levitation forces, generated by the array of electromagnets, so as to effect a predetermined bias attitude of the reaction platen, relative to the drive plane, that imparts a bias reaction force, from a reaction platen payload seating surface on a payload supported by the reaction platen seating surface, in a direction countering payload inertial force arising from acceleration of the reaction platen along the drive plane.
 8. The linear electrical machine of claim 7, further comprising position feedback sensors distributed on the frame configured for sensing position of the reaction platen along the drive plane and communicably coupled to the controller so the controller registers the sensed position of the reaction platen, wherein the controller is configured to sequentially excite the electromagnets of the array of electromagnets corresponding to the sensed position.
 9. The linear electrical machine of claim 8, wherein the controller is configured to determine acceleration of the reaction platen along the drive plane at least from changes in the sensed position, and in response to the acceleration determined, control a bias attitude of the reaction platen to provide the predetermined bias attitude countering the payload inertial force arising from the acceleration of the reaction platen.
 10. The linear electrical machine of claim 1, wherein the controller controls excitation of the electromagnets of the array of electromagnets so as to set the reaction platen attitude to bias the reaction platen against inertial forces tending to displace a payload, seated against the reaction platen, relative to the reaction platen along a seat between the payload and the reaction platen.
 11. An electromagnetic conveyor substrate transport apparatus comprising: a chamber configured to hold a sealed atmosphere therein, and having a level reference plane and at least one substrate pass through opening for transferring a substrate in and out of the chamber through the opening; an array of electromagnets, connected to the chamber to form a drive plane at a predetermined height relative to the level reference plane, the array of electromagnets being arranged so that a series of electromagnets of the array of electromagnets define at least one drive line within the drive plane, electromagnets in the series of electromagnets being grouped into at least one multiphase actuator unit, and each of the at least one multiphase actuator unit being coupled to a multiphase alternating current power source; at least one reaction platen of paramagnetic, diamagnetic, or non-magnetic conductive material disposed to cooperate with the electromagnets of the at least one multiphase actuator unit so that excitation of the electromagnets with alternating current generates levitation and propulsion forces against the reaction platen that controllably levitate and propel the reaction platen along the at least one drive line, in a controlled attitude relative to the drive plane; and a controller operably coupled to the array of electromagnets and alternating current power source and configured so as to sequentially excite the electromagnets with multiphase alternating current so that a reaction platen is levitated and propelled, wherein each alternating current phase, of the multiphase alternating current, is dynamically allocated between respective electromagnets so that the alternating current phase of each respective electromagnet, of the electromagnet group of the at least one multiphase actuator unit, changes from a first alternating current phase to a second different alternating current phase so in effect the electromagnet group moves virtually and the at least one multiphase actuator unit formed by the electromagnet group moves virtually via dynamic phase allocation along the drive line.
 12. The electromagnetic conveyor substrate transport apparatus of claim 11, wherein the reaction platen is levitated and propelled with up to six degrees of freedom including at least one of attitude and yaw control with the virtually moving at least one multiphase actuator unit.
 13. The electromagnetic conveyor substrate transport apparatus of claim 12, wherein the controller controls the up to six degrees of freedom, generated by the array of electromagnets, including at least the reaction platen attitude with the reaction platen levitated and propelled so as to move relative to the array of electromagnets along the at least one drive line from a first predetermined position with respect to the chamber to a second different predetermined position with respect to the chamber.
 14. The electromagnetic conveyor substrate transport apparatus of claim 12, wherein the controller controls the up to six degrees of freedom, generated by the array of electromagnets, including at least the reaction platen attitude and the reaction platen yaw with the reaction platen levitated and stationary relative to the array of electromagnets in a predetermined position along the at least one drive line with respect to the chamber.
 15. The electromagnetic conveyor substrate transport apparatus of claim 11, wherein the dynamic phase allocation is controlled so that the virtually moving at least one multiphase actuator unit moves virtually along the drive line substantially coincident with reaction platen movement along the drive line from propulsion by the virtually moving at least one multiphase actuator unit.
 16. The electromagnetic conveyor substrate transport apparatus of claim 11, wherein the controller controls the propulsion forces, generated by the array of electromagnets, across the reaction platen so as to impart a controlled yaw moment on the reaction platen, yawing the reaction platen about a yaw axis, substantially normal to the drive plane, from a first predetermined orientation relative to the chamber, to a second different predetermined orientation relative to the chamber.
 17. The electromagnetic conveyor substrate transport apparatus of claim 11, wherein the controller controls the propulsion forces, generated by the array of electromagnets, so as to impart a moment couple on the reaction platen effecting controlled yaw of the reaction platen so as to effect at least one of positioning and centering of a wafer payload on the reaction platen relative to a predetermined wafer holding location of the chamber.
 18. The electromagnetic conveyor substrate transport apparatus of claim 11, wherein the controller controls the levitation forces, generated by the array of electromagnets, so as to impart differential levitation forces across the reaction platen that effect a controlled inclination of the reaction platen, relative to the drive plane, that controls a predetermined reaction platen attitude in at least one of reaction platen pitch and reaction platen roll.
 19. The electromagnetic conveyor substrate transport apparatus of claim 11, wherein the controller controls the levitation forces, generated by the array of electromagnets, so as to effect a predetermined bias attitude of the reaction platen, relative to the drive plane, that imparts a bias reaction force, from a reaction platen payload seating surface on a payload supported by the reaction platen seating surface, in a direction countering payload inertial force arising from acceleration of the reaction platen along the drive plane.
 20. The electromagnetic conveyor substrate transport apparatus of claim 19, further comprising position feedback sensors distributed on the chamber configured for sensing position of the reaction platen along the drive plane and communicably coupled to the controller so the controller registers the sensed position of the reaction platen, wherein the controller is configured to sequentially excite the electromagnets of the array of electromagnets corresponding to the sensed position.
 21. The electromagnetic conveyor substrate transport apparatus of claim 20, wherein the controller is configured to determine acceleration of the reaction platen along the drive plane at least from changes in the sensed position, and in response to the acceleration determined, control a bias attitude of the reaction platen to provide the predetermined bias attitude countering the payload inertial force arising from the acceleration of the reaction platen.
 22. The electromagnetic conveyor substrate transport apparatus of claim 11, wherein the controller controls excitation of the electromagnets of the array of electromagnets so as to set the reaction platen attitude to bias the reaction platen against inertial forces tending to displace a payload, seated against the reaction platen, relative to the reaction platen along a seat between the payload and the reaction platen.
 23. The electromagnetic conveyor substrate transport apparatus of claim 11, wherein the dynamic phase allocation is controlled so that the respective electromagnets energized by the multiphase alternating current present, with respect to the reaction platen, a substantially steady state multiphase distribution across respective electromagnets of the virtually moving at least one multiphase actuator unit.
 24. A method for a linear electrical machine, the method comprising: providing the linear electrical machine with a frame, the frame having a level reference plane; forming a drive plane with an array of electromagnets connected to the frame, the drive plane is located at a predetermined height relative to the level reference plane, the array of electromagnets being arranged so that a series of electromagnets of the array of electromagnets define at least one drive line within the drive plane, and each of the electromagnets being coupled to an alternating current power source energizing each electromagnet; providing at least one reaction platen of paramagnetic, diamagnetic, or non-magnetic conductive material disposed to cooperate with the electromagnets of the array of electromagnets; and exciting the electromagnets with alternating current to generate levitation and propulsion forces against the reaction platen that controllably levitate and propel the reaction platen along the at least one drive line, in a controlled attitude relative to the drive plane; wherein the electromagnets are sequentially excited, with a controller operably coupled to the array of electromagnets and the alternating current power source, with multiphase alternating current so that each reaction platen is levitated and propelled with up to six degrees of freedom including at least one of attitude control and yaw control with a common set of the electromagnets, each of which generates, from excitation with common multiphase alternating current having a single common frequency per phase, both the levitation and the propulsion forces against the reaction platen so as to control the reaction platen with up to six degrees of freedom including at least one of reaction platen attitude and reaction platen yaw at least with the reaction platen levitated. 